Real-time grinding and polishing method based on dynamic interferometer

Abstract

The invention belongs to the technical field of modern optical measurement and manufacture and particularly relates to a real-time grinding and polishing method based on a dynamic interferometer. The real-time grinding and polishing method comprises the specific steps: (1) according to the placement position coordinate of a workpiece, the equation of a curved surface to be measured and the sizes of corresponding hole diameters measured by the dynamic interferometer at different measuring distances, software is utilized for analyzing the number, the sizes, the positions and the moving paths needing to be measured by the dynamic interferometer; (2) measurement and processing of sub hole diameters are carried out on the curved surface to be measured by a polishing component or the interferometer according to the set measuring path, the measured surface shape data are used for determining the residence time in the measured sub hole diameters and the setting of the moving trail of a grinding head in real time; (3) after washing and blow-drying the surface shape in the range of the measured hole diameters, the workpiece is polished / ground by an industrial robot. The real-time grinding and polishing method has the advantages that the cost of a used system is low, the universality and the practicability are good, dynamic online measurement and processing of multiple surface shapes can be realized and the polishing accuracy and the conformity of the polished surface shapes are high.

Description

technical field [0001] The invention belongs to the technical field of modern optical measurement and manufacture, and in particular relates to a real-time grinding and polishing method based on a dynamic interferometer. Background technique [0002] The application of aspheric or free-form optical elements in the optical system can effectively correct aberrations, improve image quality, and reduce the redundancy and complexity of the optical system. Therefore, such optical components are widely used in astronomical observation, space optics, remote sensing observation and high-power laser systems and other fields. [0003] In 2008, Andreas Kelm and others applied ABB IRB4400 industrial robot to realize the polishing of aspheric surface. The flexibility, controllability and large scale of the robot make it the polishing technology of choice for polishing complex optical components. However, the polishing of optical free-form surfaces is much more difficult than flat and sp...

AI Technical Summary

Problems solved by technology

However, the polishing of optical free-form surfaces is much more difficult than flat and spherical surfaces, especially the polishing of large-diameter and high-steep aspheric surfaces is the focus and difficulty of current research at home and abroad.

During the polishing process, the movement friction of the grinding head will cause changes in the surrounding surface shape, and at the same time, the material removed by the movement of the grinding head will affect the grinding of the surrounding surface shape, resulting in low polishing accuracy and low conformity to the shape after polishing. Therefore, there is an urgent need for existing The grinding system can realize the function of real-time information feedback

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