MEMS three-axis gyroscope based on thermal expansion flow and machining method thereof

Abstract

The invention discloses an MEMS three-axis gyroscope based on a thermal expansion flow and a machining method thereof and belongs to the field of inertia measurement. The gyroscope mainly comprises an upper sealing layer, a lower base layer and a middle detection layer, wherein the middle detection layer is provided with a cross-shaped detection cavity, and a metal resistance bridge heating element and a metal resistance bridge thermosensitive element which are located in the detection cavity. According to the MEMS three-axis gyroscope based on the thermal expansion flow disclosed by the invention, the detection layer with a ladder structure, the cross-shaped detection cavity and a suspended metal resistance bridge are arranged so as to realize simultaneous measurement of a space three-axis angular speed; the MEMS three-axis gyroscope has a very high integration level; the interferences on the measurement of an angular speed signal by a Z-axis acceleration input can be eliminated, so that the multi-degree of freedom measurement of the MEMS three-axis gyroscope based on the thermal expansion flow is realized. Furthermore, the detection layer, the base layer and the cross-shaped detection cavity of the micro-gyroscope can be formed by adopting an MEMS silicon micro-processing process, so that the MEMS three-axis gyroscope based on the thermal expansion flow has the advantages of small size, low power consumption, low cost and the like.

Description

technical field [0001] The invention relates to a MEMS gyroscope for detecting spatial three-axis angular velocity based on thermal expansion flow and a processing method thereof, belonging to the field of inertial measurement. Background technique [0002] Micro-Electro-Mechanical Systems (MEMS) is a cutting-edge technology that uses silicon-based semiconductor processes to manufacture micro-machines. The combination of MEMS technology and gyroscope technology has produced many micro gyroscopes with new principles. Among them, the MEMS vibrating gyro is based on a vibrator with high-frequency linear vibration or angular vibration, and uses the kinematic coupling generated by the Coriolis effect to detect the angular velocity input from the outside. Over the past 20 years, micromechanical vibrating gyroscopes, as an important development direction of MEMS gyroscopes, have made great progress and have been successfully applied in automotive electronics and consumer electroni...

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Problems solved by technology

In the patent application number 201210130318.2 "a miniature heat-driven airflow gyroscope and its manufacturing method", through structure and circuit design, a stable thermal expansion flow can be formed in the sealed detection chamber, but due to structural limitations, it only It can detect the angular velocity of one degree of freedom, and the integration degree is low

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