A mems resonant charge sensor with a flexible lever and method thereof

Abstract

The invention discloses an MEMS resonant mode charge sensor with flexible levers and a detection method of the MEMS resonant mode charge sensor. The MEMS resonant mode charge sensor comprises an anchor point, a double-end fixed tuning fork resonance unit, drive electrodes, induction electrodes, the two flexible levers and a charge input end. One end of the double-end fixed tuning fork resonance unit is connected with the anchor point. The other end of the double-end fixed tuning fork resonance unit is connected with the two flexible levers. The flexible levers comprise flexible lever fulcrums, flexible lever input ends and flexible lever output ends, wherein the flexible lever fulcrums, the flexible lever input ends and the flexible lever output ends are connected mutually. The double-end fixed tuning fork resonance unit is coupled with the drive electrodes and the induction electrodes. The flexible levers are coupled with the charge input end. According to the MEMS resonant mode charge sensor, a double-end fixed tuning fork serves as the resonance unit, and energy loss is small in the resonance process; electrostatic force generated by an input charge is amplified through the flexible levers, so that the change quantity of resonant frequency is increased, a high resolution ratio is obtained, and a tiny electric charge quantity can be detected; the MEMS resonant mode charge sensor with the flexible levers is simple in structure and capable of operating at an indoor temperature, and mass production of the MEMS resonant mode charge sensor can be realized easily.

Description

technical field [0001] The invention belongs to the field of sensors in the technical field of microelectromechanical systems (MEMS), and in particular relates to a MEMS resonant charge sensor with a flexible lever and a method thereof. Background technique [0002] MEMS-based charge sensors can detect small charges, have high resolution, and can be used at room temperature, so they have a wide range of applications, including biomedicine, space exploration, mass spectrometry, and particle detection in the air. [0003] A MEMS resonator is a device that vibrates at a resonant frequency by adding a driving signal with the same frequency as its natural frequency, and its resonant frequency value is related to the material and geometric structure of the device. MEMS-based resonators have been widely used in the measurement of physical quantities, including pressure, mass, temperature and acceleration, and MEMS resonators are also widely used as filters. [0004] MEMS resonator...

AI Technical Summary

Problems solved by technology

[0011] In order to overcome the shortcomings of the existing MEMS charge sensor or signal output instability, complex implementation or low resolution, the present invention provides a MEMS resonant charge sensor with a flexible lever and its method, the charge sensor not only has high resolution rate, and the structure is simple, easy to detect the output signal

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