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Production apparatus and production method for polysilicon rod

A technology for polycrystalline silicon rods and production devices, applied in chemical instruments and methods, silicon compounds, inorganic chemistry, etc., can solve problems such as unsolved problems

Active Publication Date: 2014-09-03
姚迅
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The fundamental problem with silane decomposition reactors is not solved

Method used

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  • Production apparatus and production method for polysilicon rod
  • Production apparatus and production method for polysilicon rod
  • Production apparatus and production method for polysilicon rod

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Embodiment approach

[0052] Such as figure 1 As shown, the device for producing polysilicon rods from silane gas in a cyclone-like circulation includes a bell jar 1, a chassis 2, a tubular cooler 3, a tubular cooler inner tube 3c, a plate cooler 4, an annular space 5, an electrode holder 6, and a water-cooled electrode 7 , chuck 8, mandrel 9, polysilicon rod 10, beam 11, wind wheel 12, guide pipe 13, spoiler 14, baffle plate 14a, intake pipe 15, spout 16, exhaust pipe 17, window 18, bell jar Water inlet pipe 1a, bell jar outlet pipe 1b, chassis inlet pipe 2a, chassis outlet pipe 2b, tubular cooler inlet pipe 3a, tubular cooler outlet pipe 3b, plate cooler water inlet pipe 4a, plate cooler outlet pipe 4b, leading The flow pipe 13a is followed by the flow pipe 13b.

[0053] The bell jar 1 and the chassis 2 are sealed by flanges to form a reactor. A tubular cooler 3 is set upright coaxially in the reactor, and a plate cooler 4 is arranged on the upper part of the tubular cooler 3. On the inner wall ...

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Abstract

The invention discloses a production apparatus and a production method for a polysilicon rod. The production apparatus comprises a hearth consisting of a bell jar and a chassis, an interior cooling space giving play to cooling and separation of an air flow, high-temperature silicon rods uniformly distributed in an annular space, a silane mixing dilution system consisting of a low-temperature mixing zone and a high-speed stirring zone, and a wind wheel capable of generating a circulation air flow in the hearth and generating a high-speed whirlwind air flow in the annular space; and the wind wheel drives silane and a decomposition by-product hydrogen to form the highly-diluted high-speed whirlwind circulation air flow, the air flow is orthogonally contacted with silicon rods, so that transportation and reaction of silane to a high-temperature deposition surface, and the compact homogeneous high-purity polysilicon rod is formed through rapid deposition under the condition that generation of dust is inhibited, and energy consumption is reduced.

Description

technical field [0001] The present invention relates to a production device and method of polycrystalline silicon rods, more specifically, a device and method for manufacturing polycrystalline silicon rods from silane gas with cyclone-like circulating air flow are designed. Background technique [0002] A common method for manufacturing high-purity polysilicon is chemical vapor deposition. Using high-purity silicon-containing gas to carry out reduction or decomposition reaction on the surface of high-temperature silicon rods to deposit high-purity polysilicon. Today's silicon-containing gases mainly include trichlorosilane hydrogen and silane. The main goal of polysilicon production is high quality and low energy consumption. The silane method has the advantages of high purity, less pollution, low reaction temperature and high conversion rate. However, silane may undergo heterogeneous reaction and homogeneous reaction at the same time at high temperature. While silane und...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B33/035
Inventor 姚迅
Owner 姚迅
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