High-accuracy synchronous multi-measurement-ruler based semiconductor laser distance measurement device and method

Abstract

The invention provides a high-accuracy synchronous multi-measurement-ruler based semiconductor laser distance measurement device and method and belongs to a phase laser distance measurement technology. The high-accuracy synchronous multi-measurement-ruler based semiconductor laser distance measurement device comprises a measuring ruler generation unit, a laser frequency shifting unit, a beam expanding collimation lens group and a light path and a circuit measurement unit. The high-accuracy synchronous multi-measurement-ruler based semiconductor laser distance measurement method comprises step 1, opening a frequency standard laser and a semiconductor laser; step 2, serving one beam as a reference laser beam and serving the other beam as a measurement laser beam; step 3, serving a formula as an accurate measurement ruler; step 4, serving a formula as a rough measurement ruler; step 5, moving a measurement prism to a target side to obtain the phase difference Phi 1 of the rough measurement ruler and the phase difference Phi 2 of the accurate measurement ruler and obtaining a measured distance value through a formula. According to the high-accuracy synchronous multi-measurement-ruler based semiconductor laser distance measurement device and method, the problem that the multi-measurement-ruler synchronicity and traceability of devices and methods cannot be integrated in the phase laser distance measurement technology is solved, the accuracy of distance measurement is high, the measurement efficiency is high, and the stability and the real-time performance are high.

Description

technical field [0001] The invention belongs to phase laser measurement technology, and mainly relates to a phase laser distance measuring device and method. Background technique [0002] Large-scale measurement has attracted much attention in the development of large-scale precision machinery manufacturing, major scientific and technological projects, aerospace industry, shipbuilding industry and microelectronic equipment industry and other large-scale optical-mechanical-electrical integration equipment processing and manufacturing. It is an important basis for the processing and overall assembly of large parts in aerospace vehicles and giant ships. The quality of its measurement methods and equipment performance directly affect the quality of workpieces and assembly accuracy, which in turn affects the operating quality, performance and life of the entire set of equipment. The multi-ruler phase ranging method uses a group of measuring ruler wavelengths from large to small t...

AI Technical Summary

Problems solved by technology

[0012] The purpose of the present invention is to solve the problem that the current phase laser ranging technology lacks a laser ranging device and method that can take into account high power, multi-scale synchronization and traceability, and to provide a high-precision synchronization based The semiconductor laser distance measuring device and method with multiple measuring rulers achieves the purpose of increasing the flexibility of distance measurement, simplifying the distance measurement steps, improving measurement efficiency, accuracy, stability, and real-time performance

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