Optical waveguide chip with micro-optical gyroscope Sagnac effect and preparation method thereof

Abstract

The invention discloses an optical waveguide chip with a micro-optical gyroscope Sagnac effect and a preparation method thereof. The optical waveguide chip comprises a substrate, an SiO2 (Silicon Dioxide) lower cladding layer and an SiO2 core area light guide, wherein the SiO2 core area light guide comprises an input straight waveguide part, two arc-shaped bend waveguide parts, an Achimedean spiral bending waveguide part and an output straight waveguide part; an input straight waveguide part of the SiO2 lower cladding layer and a spiral ring of the Achimedean spiral bending waveguide part are vertically crossed, so as to reduce the loss of an X Achimedean spiral bending waveguide part; two arc bending waveguide parts are oppositely connected, an input direct waveguide terminal and a starting end of the Achimedean spiral bending waveguide part are smoothly connected, and an optimal dislocation offset can be guided on the end plane of a wave guide connecting place, so that the bending loss is less. According to the optical waveguide chip, the sensitivity of the gyroscope can be improved, and the noise of the gyroscope can be reduced.

Description

technical field [0001] The invention relates to the field of optical waveguide technology, in particular to a micro-optical gyroscope Sagnac effect optical waveguide chip and a preparation method thereof. Background technique [0002] Micro-optical gyroscope is a new generation of gyroscope developed after mechanical gyroscope, laser gyroscope and fiber optic gyroscope. It replaces optical fiber with optical waveguide as the Sagnac effect sensitive element, and integrates light source, detector, processing circuit, etc. on the same silicon chip, so as to realize a new generation of gyroscope with smaller volume and higher reliability. The less lossy the optical waveguide, the higher the sensitivity of the gyroscope. At present, the loss of optical waveguides in planar technology is much larger than that of optical fibers. How to reduce the loss of optical waveguides is a key issue in realizing high-sensitivity micro-optical gyroscopes. The interferometric micro-optical gyr...

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Problems solved by technology

On the one hand, if the intersection angle is too small, part of the light passing through the spiral ring will be coupled into the spiral ring, resulting in a certain amount of light loss and interference to the final interference fringes.

On the other hand, due to the requirement of miniaturization, the radius of the helical optical waveguide needs to be as small as possible. The smaller the radius, the greater the bending loss of the optical waveguide, especially the path where the innermost circle passes through the helical ring. Small connection points with sudden changes in curvature, the bending loss of this path is relatively serious

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