Preparation device and preparation method of a controllable large aspect ratio nanoprobe

Abstract

The invention provides a preparation device of a nanometer probe controllable and large in length to diameter ratio. The preparation device of the nanometer probe controllable and large in length to diameter ratio and a single chip microcomputer are cooperatively used to achieve accurate control of important parameters of corrosion voltage, probe immersion depth, probe lifting speed and the like during the corrosion process by arranging a corrosion voltage stabilizing circuit, a corrosion voltage shutdown circuit and a probe immersion judgment circuit, and the preparation device of the nanometer probe controllable and large in length to diameter ratio can be used to prepare the nanometer probe which is large in length to diameter ratio, controllable in length to diameter ratio, recyclable and low in cost, and resists abrasion. The invention further provides a preparation method of the nanometer probe controllable and large in length to diameter ratio. The preparation method of the nanometer probe controllable and large in length to diameter ratio is characterized by not stopping corrosion after a probe is immersed into liquid of the prescribed depth, but continuing to lift the probe so as to form the novel nanometer probe which is large in length to diameter ratio and with a long needle tip of smoothly varying curvature radiuses, and has the remarkable advantages of being difficult to abrade, recyclable, low in use cost and the like. The preparation device of the nanometer probe controllable and large in length to diameter ratio improves accuracy and quality of the nanometer probe by automatically controlling the parameters of the corrosion voltage, the probe immersion depth, the probe lifting speed and the like. The preparation method of the nanometer probe controllable and large in length to diameter ratio is simple and reliable to operate.

Description

technical field [0001] The invention relates to a preparation device and a preparation method of a nanoprobe, in particular to a preparation device and a preparation method of a controllable large aspect ratio nanoprobe, belonging to the field of nanotechnology. Background technique [0002] At present, nanotechnology is developing rapidly and has a huge impact on current scientific and technological research, social production, and daily life. Nanoprobes are widely used in the field of nanotechnology, such as scanning tunneling microscopes, semiconductor measuring instruments, nanomanipulators, etc. The commonly used nanoprobe preparation methods in the prior art include ultra-vacuum ion field microscopy, grinding, shearing, field-induced (electrostatic) emission, electrochemical corrosion, and the like. Among them, the electrochemical corrosion method has gained more and more favor due to its good preparation reproducibility, low cost, and simple structure. [0003] Inve...

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Problems solved by technology

[0004] However, there are obvious defects or deficiencies in the method for preparing nanoprobes by electrochemical corrosion disclosed in the above-mentioned invention patent application:

[0005] One is that the preparation method adopts the method of first immersing the probe in the corrosive solution, then lifting it up and then standing still in the corrosive solution for corrosion. Therefore, the aspect ratio of the prepared nanoprobe is very small (the document indicates that the aspect ratio is 3.7) and the needle tip is very short. In practical applications, especially when used as a nano-manipulator arm, the probe is very easy to wear, and it will be discarded after wear and tear, and cannot be recycled and reused, so the cost of use is relatively high.

[0006] Second, although the above application also provides limitations on preparation parameters such as corrosion voltage, probe lifting speed, and lifting time, it does not reveal the quantitative relationship between the above parameters and the length-to-diameter ratio of the probe, and the selected value range is only selected based on experience. , so the control of the aspect ratio of the nanoprobe cannot be realized through the adjustment of the above-mentioned preparation parameters, that is, the aspect ratio of the prepared nanoprobe is uncontrollable

[0007] The third is that the curvature change of the nano-probe corroded in the corrosive liquid cannot be kept gentle and continuous, which affects the smooth shape of the probe.

[0008] The fourth is to set up a comparison control circuit composed of components such as a voltage comparator. Although the automatic cutting off of the corrosion voltage can also be realized, it is impossible to further control and change the lifting speed of the probe after cutting off the corrosion voltage, which is not conducive to the shape optimization of the probe tip.

[0009] Fifth, although the control parameters of the probe immersion depth are also given, the single-chip microcomputer can only control the displacement distance of the stepping motor, and cannot accurately locate the position where the probe reaches the corrosion liquid surface (that is, the starting point for depth calculation), thus affecting the control of immersion. Depth accuracy, which further affects probe aspect ratio and morphology

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