Low-energy and high-current material irradiation device
A technology of irradiation device and current intensity, which is applied in the field of low-energy and high-current intensity irradiation devices, and can solve the problems that the design of low-energy and high-current intensity material irradiation devices has not yet been reported.
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[0027] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.
[0028] A material irradiation device with low energy and high current intensity, which is used to realize the generation of high-density plasma, such as figure 1 As shown, it includes an air intake system, an air pressure monitoring device 2, a plasma generation system, a sample stage 13, a laser heating system 6, a temperature measurement system 9, a vacuum pumping system 5, a water cooling circulation system 4 and a power supply system;
[0029] The air intake system is composed of an air source 1 and a digital DIP control system 3;
[0030] The plasma generation system comprises a Faraday water cooling screen 14, a high-purity quartz barrel 12, an RF external antenna 11, a polytetrafluoro protective case 10, a grid suppression magnet 15 and an ion extraction system;
[0031] The Faraday water cooling screen 14 is made of metal materials wit...
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