High-resolution roll angle measuring method and device based on heterodyne interferometric phase method

Abstract

The invention discloses a high-resolution roll angle measuring method and device based on a heterodyne interferometric phase method. The device comprises a transverse Zeeman double-frequency laser and a beam splitter prism in an emergent light path of the transverse Zeeman double-frequency laser, and a first polarization analyzer and a first photoelectric receiver are arranged in a reflection light path of the beam splitter prism. A half-wave plate is arranged in a transmission light path of the beam splitter prism and is located in the middle of a plane mirror array, a phase delay sheet and a right-angle reflecting prism are arranged in a final emergent light path of the half-wave plate, and a second polarization analyzer and a second photoelectric receiver are arranged in a reflection light path of the right-angle reflecting prism. The first photoelectric receiver and the second photoelectric receiver are connected with a phase meter, and the output end of the phase meter is connected with an industrial personal computer. The superposition performance of acting on the polarized light is utilized when the half-wave plate and the plane mirror array are matched to be used, the half-wave plate is mounted in the plane mirror array and is used in common with the phase delay sheet, and roll angle measuring resolution is further improved.

Description

technical field [0001] The invention belongs to the field of photoelectric measurement of angles, in particular to a high-resolution roll angle measurement method and device based on a heterodyne interferophase method. Background technique [0002] Roll angle error is an important part of the geometric error of high-end machine tools. Its accuracy is one of the important reference indicators to measure the performance and machining accuracy of machine tools. Its measurement technology level is the premise and basis for error compensation and high-precision machining of high-end machine tools. [0003] There are generally three angle errors in the kinematic pair of mechanical guide rails, namely pitch angle error, yaw angle error and roll angle error. Among them, pitch angle and yaw angle errors can be measured by high-precision laser interferometers, and the measurement technology is mature and can achieve high precision; for roll angle errors, since the error direction is p...

AI Technical Summary

Problems solved by technology

However, the above method has strict position accuracy requirements for the optical components in the optical path. A 1° position error of the 1 / 4 wave plate in the plane perpendicular to the optical axis will make the measured value of the system equal to twice the true value, and the measurement system will fail.

This makes it difficult to debug and install the corresponding measurement system, and it is difficult to guarantee the anti-interference performance

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