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Three-axis micro mechanical accelerometer

An accelerometer and micro-mechanical technology, applied in the direction of measuring acceleration, speed/acceleration/impact measurement, measuring devices, etc., can solve the problems of reducing processing costs, complex processing technology, complex structure, etc., to reduce volume and weight, measure The effect of high sensitivity and small size

Inactive Publication Date: 2014-12-10
滕金燕
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  • Description
  • Claims
  • Application Information

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Problems solved by technology

The Chinese patent No. CN101133332A discloses a three-axis accelerometer based on capacitance detection, but the structure of this kind of accelerometer is complicated, so the processing technology is complicated, which is not conducive to reducing its processing cost

Method used

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  • Three-axis micro mechanical accelerometer
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  • Three-axis micro mechanical accelerometer

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Embodiment Construction

[0019] Below in conjunction with accompanying drawing and specific embodiment, the present invention is described in further detail:

[0020] like figure 1 and figure 2 Shown is a three-dimensional structure schematic diagram and a side view of the single-structure micromachined triaxial accelerometer of the present invention. The triaxial micromachined accelerometer includes a substrate 1 and an accelerometer body 2 fixedly mounted on the substrate 1 . The accelerometer body 2 includes a mass 3, a z-axis detection electrode plate 4 and a plane detection unit, wherein the plane detection unit includes a y-axis detection capacitor composed of a movable electrode 6a and a fixed electrode 7a, and a y-axis detection capacitor composed of a movable electrode 6b and a fixed electrode 7b. composed of the x-axis detection capacitor. The plane detection unit is connected with the mass block 3 and fixed on the base plate through the support beam 5 . The Z-axis detection electrode pl...

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Abstract

The invention relates to a three-axis micro mechanical accelerometer comprising a base plate and an accelerometer body fixedly mounted on the base plate. The accelerometer body comprises a mass block, a Z-axis detection electrode plate and a planar detection unit; the planar detection unit comprises movable electrodes and fixed electrodes and are connected to the mass block; the mass block is fixed to the base plate through a supporting beam; the Z-axis detection electrode plate is fixedly arranged on the base plate corresponding to the mass block. According to the three-axis micro mechanical accelerometer, acceleration measurement is achieved by a variable capacitance method, interference signal resistance capacity is high, the wiring manner is simple, signal coupling is low, and the signal to noise ratio is high. The three-axis micro mechanical accelerometer has the advantages of high integration, simple process, adaptability to mass production, low cost and the like, and further has high measurement precision and flexibility.

Description

technical field [0001] The invention relates to a micromechanical accelerometer, in particular to a single-structure three-axis micromechanical accelerometer. It belongs to the field of micro-mechanical systems (MEMS). Background technique [0002] As an inertial device, accelerometers are widely used in aerospace, automatic control and vibration testing fields. With the development of MEMS technology, micromechanical accelerometers designed and fabricated using MEMS technology have the advantages of small size, high integration and high reliability. And the advantages of low cost, it has broad application prospects in military and civilian fields, such as automotive, navigation, biological and medical equipment fields. [0003] The traditional three-axis accelerometer is a combination device that assembles three discrete single-axis accelerometers together in three-axis orthogonally to form a three-axis measurement, which is not conducive to the miniaturization of the thre...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/125
Inventor 滕金燕
Owner 滕金燕