The invention relates to a three-axis micro-mechanical
accelerometer which comprises a substrate and an
accelerometer body fixedly arranged on the substrate. The
accelerometer body comprises a
mass block, a Z-axis detection
electrode plate and a plane detection unit. The plane detection unit is composed of four detection modules which are distributed around the
mass block in the z-axis and the y-axis, the plane detection unit comprises a
resonator, a lever beam and a traction beam, and the z-axis detection
electrode plate is fixedly arranged on the position, corresponding to the
mass block, of the substrate. The three-axis micro-mechanical accelerometer achieves quick acceleration measuring by means of a variable frequency method and a variable
capacitance method, is strong in interference
signal resistance, simple in wiring mode and little in
signal coupling, and has relatively high
signal-
noise ratio. The three-axis micro-mechanical accelerometer has the advantages of being small in size, high in integrity, little in
power consumption, suitable for large-scale production, low in cost and the like, and has good measuring precision and sensitivity.