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Three-axis micro-mechanical accelerometer

An accelerometer and micro-mechanical technology, applied in the direction of measurement of acceleration, multi-dimensional acceleration measurement, speed/acceleration/shock measurement, etc., can solve the problems of unfavorable accelerometer test accuracy, signal coupling and increased interference, and achieve compact structure, The signal coupling is small and the effect of improving the signal-to-noise ratio

Inactive Publication Date: 2013-12-18
滕金燕
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Problems solved by technology

[0004] The three-axis accelerometers published in the above patents all use variable resistance for acceleration measurement. In signal processing, the resistance change signal needs to be converted into a voltage or current signal first. When the size of the accelerometer is further reduced, the effect of signal coupling and interference will be intensified. It is not conducive to improving the test accuracy of the accelerometer

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Embodiment Construction

[0021] Below in conjunction with accompanying drawing and specific embodiment the present invention is described in further detail:

[0022] Such as figure 1 and Figure 5 Shown is a three-dimensional structural diagram of a single-structure micromachined three-axis accelerometer of the present invention. The three-axis micromachined accelerometer includes a substrate 1 and an accelerometer body 2 fixedly mounted on the substrate 1 . The accelerometer main body 2 includes a mass block 3, a z-axis detection electrode plate 7 (such as Figure 4 and 8 shown) and a plane detection unit, wherein the plane detection unit is composed of four detection modules, the four modules are respectively distributed along the x-axis and y-axis around the mass block 3, and the center point of the substrate 1 is respectively along the x-axis and y-axis Symmetrically distributed evenly.

[0023] Such as figure 2 It is a schematic diagram of the structural layer of the single-structure microm...

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Abstract

The invention relates to a three-axis micro-mechanical accelerometer which comprises a substrate and an accelerometer body fixedly arranged on the substrate. The accelerometer body comprises a mass block, a Z-axis detection electrode plate and a plane detection unit. The plane detection unit is composed of four detection modules which are distributed around the mass block in the z-axis and the y-axis, the plane detection unit comprises a resonator, a lever beam and a traction beam, and the z-axis detection electrode plate is fixedly arranged on the position, corresponding to the mass block, of the substrate. The three-axis micro-mechanical accelerometer achieves quick acceleration measuring by means of a variable frequency method and a variable capacitance method, is strong in interference signal resistance, simple in wiring mode and little in signal coupling, and has relatively high signal-noise ratio. The three-axis micro-mechanical accelerometer has the advantages of being small in size, high in integrity, little in power consumption, suitable for large-scale production, low in cost and the like, and has good measuring precision and sensitivity.

Description

technical field [0001] The invention relates to a micro-machine accelerometer, in particular to a single-structure three-axis micro-machine accelerometer. It belongs to the field of micromechanical systems (MEMS). Background technique [0002] As an inertial device, accelerometers are widely used in aerospace, automatic control, and vibration testing. With the development of MEMS technology, micro-mechanical accelerometers designed and manufactured using MEMS technology have the advantages of small size, high integration, and high reliability. And the advantages of low cost have broad application prospects in military and civilian fields, such as automobiles, navigation, biology and medical equipment. [0003] The traditional three-axis accelerometer is a combination device that combines three discrete single-axis accelerometers with three axes orthogonally to form a three-axis measurement. This combination is not conducive to the miniaturization of the three-axis accelerom...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/097G01P15/125G01P15/18
Inventor 滕金燕
Owner 滕金燕
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