Far-infrared single-spectrum signal detector based on metamaterial and its preparation method

Abstract

The invention discloses a metamaterial-based far-infrared single-spectrum signal detector which comprises a substrate layer, an N-type gallium arsenide layer, a silicon dioxide layer, a metamaterial layer, an ohmic electrode and Schottky electrodes. The substrate layer, the N-type gallium arsenide layer and the silicon dioxide layer are sequentially arranged from bottom to top. The metamaterial layer refers to a metal open-loop resonance unit array with a cyclic micro-nano structure. The metal open-loop resonance unit array comprises a graph and feature size parameters thereof. The graph has a complete absorption feature to far-infrared electromagnetic waves. Corresponding electromagnetic-wave absorption frequency bands can be adjusted and controlled through change of structures and size parameters of metal open-loop resonance units. Electromagnetic-wave absorption strength of the metal open-loop resonance unit array of the metamaterial layer can be adjusted and controlled through change of depletion layer width of N-type gallium arsenide. The metamaterial-based far-infrared single-spectrum signal detector has the characteristics of high sensitivity and high speed, and can work at a specific far-infrared wave band through selection of specific structures of the metal open-loop resonance units.

Description

technical field [0001] The invention belongs to the technical field of signal detection, and more specifically relates to a metamaterial-based far-infrared single-spectrum signal detector and a preparation method thereof. Background technique [0002] Far-infrared detection is widely used in many fields such as airport security inspection system, material detection, space signal detection, aerospace and industrial and agricultural production. Common far-infrared detectors mainly include temperature detectors, high-temperature superconducting detectors, and semiconductor detectors made of silicon or gallium arsenide. These types of detectors have mature principles and have been put into practical use. [0003] However, in the case where high-speed and high-sensitivity signal detection is required, the existing far-infrared detectors have the following problems: 1. The spectral imaging device of the far-infrared detector still needs to be equipped with complex and precise fee...

AI Technical Summary

Problems solved by technology

[0004] Aiming at the above defects or improvement needs of the prior art, the present invention provides a metamaterial-based far-infrared single-spectrum signal detector and its preparation method. , slow response, and the technical problems that the spectral detection wavelength cannot be changed

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