Grid mems neural microprobe and preparation method thereof

Abstract

Disclosed are a network-type MEMS neural micro probe and a manufacture method thereof. The network-type MEMS neural micro probe comprises a base, a probe head and a probe rod. The probe head is connected to the base through the probe rod to form a probe body; silicon layers and insulation layers are arranged inside the probe head, probe rod and base; the silicon layers are arranged below the insulation layers; the surface of the probe head is provided with a plurality of detection electrodes; the surface of the base is provided with a plurality of grooves; the interior of the probe body is provided with a plurality of guide wires penetrating the interior of the probe body; one end of one guide wire is connected to one detection electrode, and the other end of the guide wire forms an externally-connected guide bonding pad, with a groove; the guide wires are arranged in the insulation layers of the probe head, probe rod and base; the probe rod is provided with a plurality of through holes distributed in a network shape. The network-type MEMS neural micro probe has the advantages that structural strength is high, biological compatibility is high, the detection signal density is high, and reliability is high.

Description

technical field [0001] The invention relates to a grid-shaped MEMS nerve microprobe and a preparation method thereof, belonging to the technical field of micro-electromechanical systems and weak signal measurement. Background technique [0002] MEMS neural microprobe is a core medical device for neural signal detection and stimulation. It has been widely used in many neural engineering systems such as brain-computer interface technology, neural prosthetics technology, diagnosis and treatment of neurological diseases, and neurological rehabilitation. Many research institutions in the United States, Europe, Japan and South Korea attach great importance to this research direction and have achieved many top scientific research and application results. [0003] Although MEMS neural microprobes have made many achievements, there are still many problems in terms of structural strength, structural biocompatibility, signal density and reliability. In terms of structural strength: ME...

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Problems solved by technology

[0003] Although MEMS neural microprobes have made many achievements, there are still many problems in terms of structural strength, structural biocompatibility, signal density and reliability.

In terms of structural strength: MEMS neural microprobes need to be implanted into nerve cells during application, so the entire probe structure needs to have sufficient mechanical strength to ensure smooth implantation. However, in general, sufficient mechanical strength means greater In terms of biocompatibility: in order to prolong the life of MEMS neural microprobes for recording neural signals, MEMS neural microprobes need to have better biocompatibility sex

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