Novel solar cell P diffusion impurity absorption process

A solar cell, a new type of technology, applied in the direction of circuits, photovoltaic power generation, electrical components, etc., can solve the problem that the gettering effect of the substrate is not particularly significant, and achieve the goal of optimizing the P diffusion process, improving the gettering effect, and improving the gettering capacity Effect

Inactive Publication Date: 2015-01-07
ZHEJIANG JINKO SOLAR CO LTD +1
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  • Summary
  • Abstract
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AI Technical Summary

Problems solved by technology

Although the currently used diffusion process has a good effect on the preparation of PN ju...

Method used

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Examples

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Comparison scheme
Effect test

Embodiment 1

[0015] Example 1: A new solar cell P diffusion and gettering process, including low-temperature boat entry, rapid temperature rise, high-temperature stabilization, high-temperature deposition, high-temperature propulsion and oxidation, rapid cooling, low-temperature deposition, low-temperature propulsion and oxidation, and low-temperature boat exit ,Specific steps are as follows:

[0016] (1) Low-temperature boat feeding: put the textured polysilicon wafer into the diffusion furnace, set the temperature of the furnace tube at 770°C, and feed 9L / min of N 2 ;

[0017] (2) Rapid temperature rise: control N after entering the boat 2 The flow rate is 9L / min, the furnace tube heats up rapidly to 825°C, and the heating rate is 10°C / min;

[0018] (3) High temperature stability: control N 2 The flow rate is 9L / min, and the furnace tube temperature is 825°C;

[0019] (4) High temperature deposition: feed 8.5L / min of N 2 , 500ml / min O 2 , 1000ml / min of N 2 -POCl 3 , control the t...

Embodiment 2

[0026] Example 2: Another new solar cell P diffusion gettering process, including low-temperature boat entry, rapid temperature rise, high-temperature stabilization, high-temperature deposition, high-temperature propulsion and oxidation, rapid cooling, low-temperature deposition, low-temperature propulsion and oxidation, and low-temperature exit Steps, the specific steps are as follows:

[0027] (1) Low-temperature boat feeding: put the textured polysilicon wafer into the diffusion furnace, set the temperature of the furnace tube at 770°C, and feed 9L / min of N 2 ;

[0028] (2) Rapid temperature rise: control N after entering the boat 2 The flow rate is 9L / min, the furnace tube heats up rapidly to 830°C, and the heating rate is 10°C / min;

[0029] (3) High temperature stability: control N 2 The flow rate is 9L / min, and the furnace tube temperature is 830°C;

[0030] (4) High temperature deposition: feed 8.5L / min of N 2 , 500ml / min O 2 , 1000ml / min of N 2 -POCl 3 , co...

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PUM

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Abstract

The invention discloses a novel solar cell P diffusion impurity absorption process. The novel solar cell P diffusion impurity absorption process is characterized by including the steps of low temperature feeding, rapid heating, high temperature stabilization, high temperature deposition, high temperature propulsion and oxidation, rapid cooling, low temperature deposition, low temperature propulsion and oxidation and low temperature discharging, wherein according to the high temperature deposition step, 8.5-9 L of N2, 500 ml of O2 and 1000 ml of N2-POCl3 are introduced per minute, the temperature of a furnace tube is controlled to be lower than or equal to 830 DEG C, and 12-13 minutes are consumed; according to the high temperature propulsion and oxidation step, 7.5-8 L of N2 and 800 ml of O2 are introduced per minute, the temperature of the furnace tube is controlled to be lower than or equal to 830 DEG C, and 8 minutes are consumed. The novel solar cell P diffusion impurity absorption process belongs to the varying temperature diffusion technology, can guarantee a good P diffusion effect, can improve the impurity absorption capacity during P diffusion and prolong the minority carrier lifetime of a solar cell, and facilitates promotion of conversion efficiency of the solar cell.

Description

technical field [0001] The invention relates to a novel solar cell gettering process, in particular to a novel solar cell P diffusion gettering process. Background technique [0002] At present, the production process of solar cells mainly includes cleaning texturing, diffusion, etching, PECVD, screen printing, and sintering, while the research and development of solar cells focuses on diffusion, PECVD, and screen printing. Among them, diffusion is the core process of preparing solar cells, and its purpose is to form a PN junction on the basis of P(N) type silicon. Therefore, the improvement and optimization of the diffusion process has attracted extensive attention of researchers. The existing solar cell diffusion process mainly includes heating, oxidation, pre-deposition, redistribution, oxidation, and gettering. The process has the advantages of less diffusion time, simple process and easy industrialization, so it has been widely promoted and applied. However, since the...

Claims

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Application Information

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IPC IPC(8): H01L31/18
CPCH01L21/223H01L31/1804H01L31/1864Y02E10/547Y02P70/50
Inventor 叶飞蒋方丹金浩陈康平
Owner ZHEJIANG JINKO SOLAR CO LTD
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