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Semiconductor laser unit cavity surface coating film control wafer and application

A laser and semiconductor technology, applied in the direction of semiconductor lasers, lasers, laser parts, etc., can solve the problems of pollution, inhibit laser performance, easy to oxidize the surrounding environment, etc., and achieve the effect of improving reliability, easy processing, and reducing damage.

Inactive Publication Date: 2015-01-21
BEIJING UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The reflectivity of the natural cleavage plane of the usual GaAs laser is about 32%, which is not an ideal value, and this natural cleavage plane is easy to oxidize in the air and be polluted by the surrounding environment, which inhibits the performance of the laser, especially for high-power lasers. service life

Method used

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  • Semiconductor laser unit cavity surface coating film control wafer and application
  • Semiconductor laser unit cavity surface coating film control wafer and application
  • Semiconductor laser unit cavity surface coating film control wafer and application

Examples

Experimental program
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Embodiment 1

[0026] 1. Here we take a companion piece with a length of 12.5mm and a width of 4mm as an example. The width of the etched part is 10-20um and the length is 10.5mm. Use a pre-designed photolithography plate to glaze the GaAs substrate. Carve out the required pattern, and use dry etching or wet etching to etch the designed structure. In order to obtain the companion film required for the experiment, the width of the exposure area should be widened as much as possible when designing the photolithography plate , so that the desired etching depth can be obtained during etching.

[0027] 2. Use a dicing machine to cleavage the etched GaAs test piece into a companion piece with a strip length of 12.5mm and a strip width of 4mm. The companion piece obtained at this time is the required new semiconductor laser cavity surface coating companion piece, such as figure 2 shown.

[0028] 3. Place the unetched surface opposite to the engraved surface of the two new-type semiconductor laser...

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Abstract

The invention provides a semiconductor laser unit cavity surface coating film control wafer and belongs to the technical field of semiconductor laser unit technologies. At present, coating film control wafers used at home and abroad are manufactured according to the size of a formal wafer, the semiconductor laser unit cavity surface coating film control wafer is single-sided I-shaped, and the other side of the control wafer is still the same as the formal wafer in size. The semiconductor laser unit cavity surface coating film control wafer is exquisite in design, easy to process, practical, simple and convenient to operate, separation difficulty brought by film layer adhesion after film coating is reduced, the damage degree of a semiconductor laser unit cavity surface film is reduced, and the reliability of a semiconductor laser unit is improved.

Description

technical field [0001] The invention relates to a coating companion on the cavity surface of a semiconductor laser. The invention relates to a companion for protecting the cavity film layer of a semiconductor laser, and belongs to the technical field of semiconductor laser technology. Background technique [0002] High-power semiconductor lasers have the characteristics of all solid-state, small size, light weight, long life, high efficiency, high reliability, adjustable, stable low-voltage operation, etc. They are mainly used as pump sources for solid-state lasers, and in laser processing, laser Welding, laser printing and other fields have a wide range of applications. Semiconductor lasers are the key components of a new generation of high-tech, and will play a pivotal role in future industrial development. [0003] The cleavage plane as the resonator is an important part of the semiconductor laser, and it has a very important influence on the reliability of the device. ...

Claims

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Application Information

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IPC IPC(8): H01S5/10H01S5/028
Inventor 崔碧峰何新凌小涵刘梦涵
Owner BEIJING UNIV OF TECH