A Quantitative Nano Heating Stage for Electron Microscopy
A technology of electron microscope and heating stage, which is applied in the direction of material analysis by using wave/particle radiation, material analysis by measuring secondary emissions, circuits, etc. It can solve the problems of sample deviation, influence on in-situ imaging, and high price, and achieve Avoid height changes, facilitate temperature control, and reduce the effect of heat transfer
A technology of electron microscope and heating stage, which is applied in the direction of material analysis by using wave/particle radiation, material analysis by measuring secondary emissions, circuits, etc. It can solve the problems of sample deviation, influence on in-situ imaging, and high price, and achieve Avoid height changes, facilitate temperature control, and reduce the effect of heat transfer
CN104319220BActive Publication Date: 2016-08-24咸阳瞪羚谷新材料科技有限公司
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[0029] The present invention is described in further detail below in conjunction with accompanying drawing:
[0030] refer to figure 1 , figure 2 , image 3 , The quantitative nano-heating stage for electron microscope of the present invention includes a substrate 1, a nano-heating stage 3, a flexible connector 4, a heating test resistor 5, a wire 2, and a sample observation hole 6.
[0031] The quantitative nano-heating table for electron microscope of the present invention is processed by MEMS technology, with the outer surface of the substrate layer 9 as the base surface 18, from bottom to top is divided into substrate layer 9, silicon dioxide intermediate layer 10, top Silicon layer 11, insulating layer 12, wire layer 2 / heating test resistance layer 5, surface protection layer 13, sample supporting film layer 14. The substrate 1 is a chamfered rectangle with a square through hole in the center, which is composed of a substrate layer 9, a silicon dioxide intermediate la...
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The invention discloses a quantitative nanometer heating table for an electron microscope. The quantitative nanometer heating table for the electron microscope comprises a base body, a nanometer heating table body, at least two flexible connecting pieces, a heating testing resistor and leads, a through hole is formed in the middle of the base body, the nanometer heating table body is located in the through hole, one ends of the flexible connecting pieces are connected with the lateral surface of the nanometer heating table body, the other ends of the flexible connecting pieces are connected with the inner wall of the through hole, the heating testing resistor is located at the upper surface of the nanometer heating table body, and the lead is located at the upper surfaces of the base body and the flexible connecting pieces; the heating testing resistor comprises at least two lead-out ends, the lead-out ends of the heating testing resistor are connected with an external power supply after being led to the upper surface of the base body through the lead, and a plurality of sample observation holes are opened in the nanometer heating table. The quantitative nanometer heating table for the electron microscope is capable of solving the bad influence on thermal drift due to high-power imaging, effectively avoiding the sample region bulging due to thermal expansion, and precisely measuring and timely controlling the sample temperature.
Description
technical field [0001] The invention belongs to the research field of electron microscope accessories and in-situ measurement of nanometer materials, and relates to a quantitative nano heating platform, in particular to a quantitative nano heating platform for electron microscopes based on MEMS technology. Background technique [0002] An electron microscope refers to a microscope that uses electrons to form images, such as transmission electron microscopes and scanning electron microscopes. In recent years, with the development of advanced technologies such as spherical aberration correction and single-electron detection, electron microscopes have made great progress in terms of spatial resolution, time resolution, and chemical composition analysis in micro-regions, which has greatly promoted the development of catalysts, electron microscopy, etc. Research progress in the fields of materials, phase change materials, etc., and many promising potential applications have been ...
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Patent Timeline
24 Aug 2016
Publication
CN104319220B
- IPC
- H01J37/20; G01N23/22
- CPC
- G01N23/2204; H01J37/20
- Inventors
- 李蒙; 单智伟