A Quantitative Nano Heating Stage for Electron Microscopy

Abstract

The invention discloses a quantitative nanometer heating table for an electron microscope. The quantitative nanometer heating table for the electron microscope comprises a base body, a nanometer heating table body, at least two flexible connecting pieces, a heating testing resistor and leads, a through hole is formed in the middle of the base body, the nanometer heating table body is located in the through hole, one ends of the flexible connecting pieces are connected with the lateral surface of the nanometer heating table body, the other ends of the flexible connecting pieces are connected with the inner wall of the through hole, the heating testing resistor is located at the upper surface of the nanometer heating table body, and the lead is located at the upper surfaces of the base body and the flexible connecting pieces; the heating testing resistor comprises at least two lead-out ends, the lead-out ends of the heating testing resistor are connected with an external power supply after being led to the upper surface of the base body through the lead, and a plurality of sample observation holes are opened in the nanometer heating table. The quantitative nanometer heating table for the electron microscope is capable of solving the bad influence on thermal drift due to high-power imaging, effectively avoiding the sample region bulging due to thermal expansion, and precisely measuring and timely controlling the sample temperature.

Description

technical field [0001] The invention belongs to the research field of electron microscope accessories and in-situ measurement of nanometer materials, and relates to a quantitative nano heating platform, in particular to a quantitative nano heating platform for electron microscopes based on MEMS technology. Background technique [0002] An electron microscope refers to a microscope that uses electrons to form images, such as transmission electron microscopes and scanning electron microscopes. In recent years, with the development of advanced technologies such as spherical aberration correction and single-electron detection, electron microscopes have made great progress in terms of spatial resolution, time resolution, and chemical composition analysis in micro-regions, which has greatly promoted the development of catalysts, electron microscopy, etc. Research progress in the fields of materials, phase change materials, etc., and many promising potential applications have been ...

AI Technical Summary

Problems solved by technology

However, this heating platform has the following disadvantages: First, the heating platform does not have real-time temperature measurement capability

Secondly, because the heating area is a strongly constrained film, its central part will bulge up to tens of microns when heated, and the direction of bulging is uncontrollable and predictable

This is very unfavorable for in situ imaging. Since the electron microscope is very sensitive to the height of the sample in high-resolution imaging mode, the change of the center height of the device will cause the sample to deviate from the focal plane, which will seriously affect the image quality.

Third, the heating table is a consumable material, and there is no similar product in China, and the purchase from abroad is not only expensive but also requires a long purchase cycle due to reasons such as customs clearance, which seriously restricts the development of this research field in China

However, similar to the device of Damiano et al., since the heating area is a strongly constrained film, the thermal expansion of the entire film area during the heating process causes the sample area to bulge, which makes the sample deviate from the focal plane and affects in-situ imaging.

[0008] All the above-mentioned in-situ heating stages for electron microscopy, due to design defects, the thermal expansion of the heating area during the heating process will lead to significant changes in the position of the sample, which cannot meet the needs of researchers to quantify materials under high spatial resolution conditions. Heating Research Requirements

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