Stick-slip inertia based serial three-degree-of-freedom piezoelectric precision driving platform

Abstract

The invention relates to a stick-slip inertia based serial three-degree-of-freedom piezoelectric precision driving platform and the linear motion along the x and y direction and the rotating motion around the z axis direction can be implemented. The stick-slip inertia based serial three-degree-of-freedom piezoelectric precision driving platform comprises a lower layer of x axis linear driver assembly, a middle layer of y axis linear driver assembly and an upper layer of z axis rotating driver assembly which are connected in turn and sawtooth waves are input towards piezoelectric stacks based on the stick-slip inertia principle to implement the stepping type continuous feeding of an output terminal. The symmetry and the frequency of the sawtooth waves are changed to change the feeding direction and speed. The positioning motion of the rapid feeding positioning and the precise feed positioning can be implemented through different modes of control on the piezoelectric stacks and accordingly the rapid and high precision positioning can be obtained simultaneously. The stick-slip inertia based serial three-degree-of-freedom piezoelectric precision driving platform has the advantages of being small and compact in structure, large in output stroke, adjustable in speed, large in bearing capacity, stable and reliable in work, good in repeatability and suitable for large stroke of precision motion control occasions with strict space size constraints.

Description

technical field [0001] The invention relates to a series-type three-degree-of-freedom piezoelectric precision drive platform based on stick-slip inertia, which is applied in the fields of microbiology technology, large-scale and ultra-large-scale integrated circuit manufacturing, micro-nano micro-manipulation robots, micro-electromechanical systems and the like. Background technique [0002] In recent years, with the rapid development of science and technology, research on micro-nano science and technology has also achieved rapid development. The scientific fields of manufacturing and micro-nano micromanipulation robots have been widely used. Micro-nano manipulation technology is a very frontier and very important research topic in micro-nano science and technology. Micro-nano manipulation technology refers to the precise operation and control of objects at the micro-nano scale, such as cells, molecules, and atoms. It is a vital means for human beings to explore the mi...

AI Technical Summary

Problems solved by technology

The general inchworm-type piezoelectric drive cannot be fully adapted to micro-nano operations due to its shortcomings such as small measuring range, slow speed, and poor carrying capacity.

However, in the parallel multi-degree-of-freedom piezoelectric actuator, each movement interferes with each other, which cannot guarantee movement in a single direction, nor can it satisfy the field of micro-nano operation technology.

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