Preparation method of InGaN/Si three-junction solar cell
A technology for solar cells and batteries, applied in the field of solar cells, can solve the problems of not making full use of the solar spectrum, increasing the complexity of the epitaxy process, reducing the total conversion efficiency of the battery, etc., so as to improve the radiation resistance, prolong the service life, and improve the conversion efficiency. Effect
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[0023] The preparation method of InGaN / Si triple-junction solar cells includes depositing an n-Si layer on one side of the n-Si substrate by MOCVD technology to form a Si bottom cell, and sequentially growing 50-100nm thick AlN on the n-Si layer of the Si bottom cell Nucleation layer, 0.5-2μm thick GaN buffer layer, 50nm-350nm thick In x Ga 1-x N first cell, 10nm-50nm thick tunnel junction and 50nm-350nm thick In y Ga 1-y N second battery;
[0024] The innovation of the present invention is to also include the following preparation steps:
[0025] ⑴In y Ga 1-y Evaporate a 150-350nm translucent current spreading layer on the N second battery, put it in an annealing furnace after evaporation, 350-500°CN 2 Under the environment, anneal for 10-20 minutes, and cool to room temperature with the furnace;
[0026] (2) After coating the photoresist on the translucent current spreading layer after the annealing treatment, a comb-shaped groove with a depth of 50-100nm is photoetch...
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[0033] Step 1, select n-Si after ultrasonic cleaning as the substrate;
[0034] Step 2. Using Metal Organic Chemical Vapor Deposition (MOCVD), place the n-Si substrate in the reaction chamber and inject TMAl and NH 3 , as the temperature rises, Al atoms begin to diffuse into the n-Si layer to replace Si atoms, and a p-Si layer is formed on the n-S substrate to form a Si bottom cell 1; ) growing an AlN nucleation layer 2 with a thickness of 50-100nm (optimum 60nm);
[0035] Step 3, using metal organic chemical vapor deposition technology to grow GaN buffer layer 3 on the AlN nucleation layer, the growth temperature is 900-1100 °C, and the thickness range is 0.5-2 μm. This layer can reduce the defect density of the epitaxial layer, thereby improving crystal quality;
[0036] Step 4, growing In on the GaN buffer layer x Ga 1-x N first cell 4, comprising Si-doped n-In x Ga 1-x N-layer and Mg-doped p-In x Ga 1-x N layer, the growth temperature is 600-1100°C (the optimum val...
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