Method for determining heavy ion LET value in single event effect experiment for components
A single event effect, heavy ion technology, applied in the field of space radiation, can solve problems such as poor adaptability, inconvenient application by non-particle physics majors, and inability to directly give LET values, to ensure the correctness.
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[0030] The present invention will be described in detail below with reference to the accompanying drawings and examples.
[0031] (1) Determine the parameters such as the thickness and composition of the device shielding material;
[0032] Such as figure 1 As shown, the shielding layer of components includes the following layers of shielding layer materials: passivation layer 1, gate 4, and metal wiring layer 2 and oxide layer 3 that are stacked on each other. The thickness and composition of each layer of shielding material are heavy ion Input parameters for the LET value correction method. The detailed data of these parameters is regarded as the technical secret of the device manufacturer, which is difficult to obtain through normal channels, but can be obtained through reverse engineering.
[0033] First, the device is longitudinally cut, and a smooth section of the device is obtained by chemical mechanical polishing (CMP); then the section of the device is measured by a ...
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