Illumination system
An illumination system and a right-angle prism technology, applied in the field of illumination systems, can solve the problems of reducing the illuminance of the mask surface, reducing the energy coupling efficiency of the quartz rod 3, etc., so as to improve the pupil uniformity, improve the energy coupling efficiency, and reduce the energy loss. Effect
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Example Embodiment
[0050] Example 1
[0051] A lighting system provided by the present invention, such as Figure 5 to Figure 9 As shown, including light sources arranged in sequence ( Figure 5 Not shown), the ellipsoid bowl assembly 10, the coupling lens group 20, the turning module 30, the micro lens array 40, the quartz rod 50, the relay lens group 60, and the illumination object 70. Preferably, the light source is a high voltage Mercury lamp, the ellipsoidal bowl assembly 10 is an ellipsoidal bowl reflector, the light incident end of the folding module 30 is square, the light output end of the folding module 30 and the light incident end of the quartz rod 50 are shaped Similarly, the light emitted by the light source is condensed by the ellipsoidal bowl assembly 10 and then enters the coupling lens group 20, and then passes through the reflex module 30, the microlens array 40 and the multiple reflection uniform light of the quartz rod 50 Then it enters the relay lens group 60 and finally forms...
Example Embodiment
[0061] Example 2
[0062] The difference between this embodiment and Embodiment 1 is that the position of the coupling lens group is different.
[0063] Specifically, the object focal planes of the light source and the coupling lens group 20 are respectively located at the two focal points of the ellipsoidal bowl assembly 10, and the light incident end of the deflection module 30 is located at the focal point of the ellipsoidal bowl assembly 10. , The object focal plane of the coupling lens group 20 coincides with the light output end of the folding module 30, and the microlens array 40 is located at the light output end of the folding module 30 and the light input end of the quartz rod 50 In between, the object focal plane of the relay lens group 60 coincides with the light exit end of the quartz rod 50, and the illumination object 70 is located at the image focal plane of the relay lens group 60. This embodiment can achieve the goal of increasing the system mask surface illumina...
Example Embodiment
[0064] Example 3
[0065] Please refer to Picture 10 , 11 , As the first modification of the folding module, on the left side of the first prism, the length and width are L*2L, and on the right, the third right-angle prism, the length and width are L*2L. The surface forms the light-incident end of the folding module, and its length and width are respectively 2L*2L; in the upper part of the second prism, the length and width are respectively L*2L and a surface of the second right-angle prism at the lower part The surface of the length and width respectively L*2L constitutes the light output end of the folding module, and the length and width are respectively L*4L.
[0066] A part of the light that enters the light entrance end of the folding module passes through the first prism, the first right-angle prism, and the second right-angle prism in sequence, and then exits the folding module; and enters the other part of the light entrance end of the folding module The light passes thr...
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