Cavity liners for electromechanical systems devices

A technology of electromechanical systems and electrode devices, applied in the direction of microelectronic microstructure devices, microstructure devices, manufacturing microstructure devices, etc., can solve problems such as surface wear

Inactive Publication Date: 2015-03-18
SNAPTRACK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The repeated contact ca

Method used

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  • Cavity liners for electromechanical systems devices
  • Cavity liners for electromechanical systems devices
  • Cavity liners for electromechanical systems devices

Examples

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Embodiment Construction

[0026] The following detailed description is directed to some implementations for the purposes of describing innovative aspects. However, the teachings herein can be applied in many different ways. The described implementations can be implemented in any device configured to display images, whether in motion (eg, video) or still images (eg, still images), and whether textual, graphical, or pictorial. More particularly, it is contemplated that the implementations may be implemented in or associated with a variety of electronic devices such as, but not limited to, mobile telephones, multimedia Internet enabled cellular Telephones, mobile TV receivers, wireless devices, smart phones, Devices, Personal Data Assistants (PDAs), Wireless Email Receivers, Handheld or Laptop Computers, Netbooks, Notebooks, Smartbooks, Tablet Computers, Printers, Copiers, Scanners, Fax Devices, GPS Receivers / Navigators, Cameras , MP3 players, video cameras, game consoles, wrist watches, clocks, calcul...

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Abstract

This disclosure provides systems, methods and apparatus for electromechanical systems devices with improved electrical properties and device life span. In one aspect, a conformal antistiction layer is formed within a cavity of an electromechanical systems apparatus over a roughened surface. The conformal antistiction layer can include a dielectric layer. The conformal antistiction layer can include a self-assembled monolayer (SAM) formed over the dielectric layer. The conformal antistiction layer can replicate the roughness of the surface that it is deposited on.

Description

technical field [0001] The present invention relates to coatings for electromechanical systems. Background technique [0002] Electromechanical systems include devices having electrical and mechanical elements, actuators, transducers, sensors, optical components (eg, mirrors), and electronics. Electromechanical systems can be fabricated at a variety of scales, including (but not limited to) microscale and nanoscale. For example, microelectromechanical systems (MEMS) devices can include structures having sizes ranging from about one micron to hundreds of microns or more. Nanoelectromechanical systems (NEMS) devices can include structures having sizes smaller than a micron, including, for example, sizes smaller than hundreds of nanometers. Electromechanical elements may be created using deposition, etching, photolithography, and / or other micromachining processes that etch away portions of substrates and / or deposited material layers, or add layers to form electrical and elect...

Claims

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Application Information

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IPC IPC(8): B81B3/00
CPCB81C2201/0107B81B3/001B81B2201/042B81B3/0005B81C1/00015
Inventor 桑德迪普·K·吉里
Owner SNAPTRACK
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