Flexible composite dry electrode and manufacturing method thereof

Abstract

The invention provides a flexible composite dry electrode and a manufacturing method thereof. The electrode comprises an electrode support layer, electrode points and electrode wire connection points. The method includes the following steps: 1) utilizing glass as a substrate; 2) precipitate a Pary lene C film on the glass substrate; 3) conducting sputtering on a Cr / Cu seed layer; 4) applying positive photoresist on the seed layer and conducting exposure, developing and imaging on the photoresist layer; 5) conducting electroplating on Ag; 6) applying the photoresist and conducting exposure, developing and imaging on the photoresist layer; 7) conducting chlorination on the Ag through an anode oxidizing method to generate AgCl; 8) removing the photoresist; 9) removing the electrode from the glass substrate. The electrode is a flexible thin film electrode, can be in well fit with the skin, increase the effective contact area between the electrode and the skin and can resist interference on the moving track. The electrode has the advantages of dry electrodes and wet electrode, can record the physiological signals with high quality and is especially applicable to a wearable device.

Description

technical field [0001] The invention relates to an electrode in the field of medical devices, in particular to a flexible composite dry electrode for measuring electrocardiogram, electroencephalogram, myoelectricity, oculoelectricity and other physiological electricity and a preparation method thereof. Background technique [0002] Physiological electricity is a kind of ionic current. The principle of generation is that there is a concentration difference between the concentration of potassium ions, sodium ions and chloride ions inside and outside the cell. Therefore, a wet silver / silver chloride (Ag / AgCl) electrode is generally used to measure physiological electricity. This kind of electrode is used together with conductive gel, and the conductive gel is used as the electrolyte to convert ionic current into electronic current through oxidation-reduction reaction and conduct it to the physiological electricity collection system. [0003] However, this kind of electrode has...

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Problems solved by technology

[0005] Aiming at the defects in the prior art, the object of the present invention is to provide a flexible composite dry electrode and its preparation method. The composite dry electrode has the advantages of dry electrode and wet electrode, so as to solve the problem that the wet electrode needs conductive glue when it is used. Inconvenience and signal distortion caused by dry electrodes when collecting physiological electrical signals

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