Coaxiality detection and adjusting method of multiple beams
An adjustment method and multi-beam technology, which is applied in the direction of optical instrument testing, measuring devices, machine/structural component testing, etc., can solve the problems of difficult detection and adjustment of multi-beam light sources, achieve a wide range of use, increase coaxial accuracy, The effect of reducing complexity and cost
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[0034] Specific embodiments of the present invention include:
[0035] Step 1) The first beam of laser light 1 is reflected by the first reflector 3 and the second reflector 4 in turn, and transmitted to the objective lens 10 through the second beam splitter 6, and the second beam of laser light 2 is directly incident on the first On the two beam splitters 6, and through its reflection, the first beam of laser light 1 passes through the light transmitted by the second beam splitter 6 to synthesize a bunch of light rays that cannot be distinguished by naked eyes, pass through the objective lens 10, and converge to the said second beam splitter 6. At the focal point of the objective lens 10;
[0036] Step 2) select a particle 11 and place it on the focal plane of the objective lens 10, the incident light that cannot be distinguished by the naked eye converges on the particle 11 through the objective lens 10 to form a focused spot, and the particle 11 is a transparent carrier, S...
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