Furnace body of a polysilicon reduction furnace
A technology of polysilicon and reduction furnace, applied in the direction of silicon, etc., can solve the problems of high energy consumption of polysilicon reduction furnace, difficulty in polishing the inner wall of the furnace, low polysilicon, etc., and achieve the effect of preventing high-temperature hydrogen chloride corrosion, ensuring service life and improving utilization rate
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Embodiment 1
[0017] Example 1: Such as figure 1 , 2 3, the polysilicon reduction furnace body includes a sandwich furnace inner wall 1; a chassis 2; stainless steel bolts 3; a metal heat insulation plate 4; an isolation block 6; a furnace wall sandwich 7; a sandwich furnace outer wall 8; and an isolation gasket 9. According to the inner wall 1 of the sandwich furnace, the metal heat insulation board 4 is made in proportion to keep the shape consistent with the inner wall 1 of the sandwich furnace. For small furnaces, the area of the inner wall 1 of the sandwich furnace is relatively small, and the radiant heat loss is relatively slow. A metal heat insulation plate 4 with a thickness of 2.1mm can be used, a total of 3 layers, the bolt hole diameter of the plate is 10mm, and the specification is M8 Stainless steel SUS316L bolts with a screw length of 30mm. By welding a stainless steel spacer 9 with a thickness of 5mm with bolt holes on the outside of the metal heat insulation plate 4, the di...
Embodiment 2
[0018] Example 2: Such as figure 1 , 2 3, the polysilicon reduction furnace body includes a sandwich furnace inner wall 1; a chassis 2; a stainless steel bolt 3; a metal heat insulation plate 4; an isolation block 6; a furnace wall sandwich 7; a sandwich furnace outer wall 8; and an isolation gasket 9. According to the inner wall 1 of the sandwich furnace, the metal heat insulation board 4 is made in proportion to keep the shape consistent with the inner wall 1 of the sandwich furnace. For medium-sized furnaces, the radiant heat loss of the inner wall 1 of the sandwich furnace is relatively fast. A metal heat insulation plate 4 with a thickness of 3mm and a total of 4 layers can be used. The diameter of the bolt holes on the plate is 12mm. The stainless steel 304 bolts and screws of M10 are used. The length is 60mm. By welding a stainless steel spacer 9 with bolt holes and a thickness of 8mm on the outer side of the metal heat insulation board 4, the distance between the heat in...
Embodiment 3
[0019] Example 3: Such as figure 1 , 2 3, the polysilicon reduction furnace body includes a sandwich furnace inner wall 1; a chassis 2; stainless steel bolts 3; a metal heat insulation plate 4; an isolation block 6; a furnace wall sandwich 7; a sandwich furnace outer wall 8; and an isolation gasket 9. According to the inner wall 1 of the sandwich furnace, the metal heat insulation board 4 is made in proportion to keep the shape consistent with the inner wall 1 of the sandwich furnace. For large furnaces, the inner wall 1 of the sandwich furnace has a large area, and the radiant heat loss is very fast. The metal heat insulation board 4 can be used, a total of 5 layers, of which the inner and outer layers are 5mm thick, the middle three layers are 2.2mm thick, and the plate has bolt holes The diameter is 14mm, and the M12 stainless steel SUS316L bolts are used. The screw length is 90mm. By welding the stainless steel spacer 9 with bolt holes and the thickness of 10mm on the outer ...
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