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Furnace body of a polysilicon reduction furnace

A technology of polysilicon and reduction furnace, applied in the direction of silicon, etc., can solve the problems of high energy consumption of polysilicon reduction furnace, difficulty in polishing the inner wall of the furnace, low polysilicon, etc., and achieve the effect of preventing high-temperature hydrogen chloride corrosion, ensuring service life and improving utilization rate

Inactive Publication Date: 2016-12-07
SPECIAL EQUIP SAFETY SUPERVISION INSPECTION INST OF JIANGSU PROVINCE +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The object of the present invention is to provide a polysilicon reduction furnace body with multi-layer metal heat insulation boards. By providing a heat shield in the interlayer furnace body, the existing polysilicon reduction furnace has high energy consumption, difficulty in polishing the inner wall of the furnace, and heat loss. Radiation causes the problem of high-temperature hydrogen chloride corrosion on the inner wall of the furnace, thereby improving the utilization rate of heat energy in the furnace, and reducing the energy consumption of polysilicon with lower electric energy and easy-to-operate technology

Method used

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  • Furnace body of a polysilicon reduction furnace
  • Furnace body of a polysilicon reduction furnace
  • Furnace body of a polysilicon reduction furnace

Examples

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Comparison scheme
Effect test

Embodiment 1

[0017] Example 1: Such as figure 1 , 2 3, the polysilicon reduction furnace body includes a sandwich furnace inner wall 1; a chassis 2; stainless steel bolts 3; a metal heat insulation plate 4; an isolation block 6; a furnace wall sandwich 7; a sandwich furnace outer wall 8; and an isolation gasket 9. According to the inner wall 1 of the sandwich furnace, the metal heat insulation board 4 is made in proportion to keep the shape consistent with the inner wall 1 of the sandwich furnace. For small furnaces, the area of ​​the inner wall 1 of the sandwich furnace is relatively small, and the radiant heat loss is relatively slow. A metal heat insulation plate 4 with a thickness of 2.1mm can be used, a total of 3 layers, the bolt hole diameter of the plate is 10mm, and the specification is M8 Stainless steel SUS316L bolts with a screw length of 30mm. By welding a stainless steel spacer 9 with a thickness of 5mm with bolt holes on the outside of the metal heat insulation plate 4, the di...

Embodiment 2

[0018] Example 2: Such as figure 1 , 2 3, the polysilicon reduction furnace body includes a sandwich furnace inner wall 1; a chassis 2; a stainless steel bolt 3; a metal heat insulation plate 4; an isolation block 6; a furnace wall sandwich 7; a sandwich furnace outer wall 8; and an isolation gasket 9. According to the inner wall 1 of the sandwich furnace, the metal heat insulation board 4 is made in proportion to keep the shape consistent with the inner wall 1 of the sandwich furnace. For medium-sized furnaces, the radiant heat loss of the inner wall 1 of the sandwich furnace is relatively fast. A metal heat insulation plate 4 with a thickness of 3mm and a total of 4 layers can be used. The diameter of the bolt holes on the plate is 12mm. The stainless steel 304 bolts and screws of M10 are used. The length is 60mm. By welding a stainless steel spacer 9 with bolt holes and a thickness of 8mm on the outer side of the metal heat insulation board 4, the distance between the heat in...

Embodiment 3

[0019] Example 3: Such as figure 1 , 2 3, the polysilicon reduction furnace body includes a sandwich furnace inner wall 1; a chassis 2; stainless steel bolts 3; a metal heat insulation plate 4; an isolation block 6; a furnace wall sandwich 7; a sandwich furnace outer wall 8; and an isolation gasket 9. According to the inner wall 1 of the sandwich furnace, the metal heat insulation board 4 is made in proportion to keep the shape consistent with the inner wall 1 of the sandwich furnace. For large furnaces, the inner wall 1 of the sandwich furnace has a large area, and the radiant heat loss is very fast. The metal heat insulation board 4 can be used, a total of 5 layers, of which the inner and outer layers are 5mm thick, the middle three layers are 2.2mm thick, and the plate has bolt holes The diameter is 14mm, and the M12 stainless steel SUS316L bolts are used. The screw length is 90mm. By welding the stainless steel spacer 9 with bolt holes and the thickness of 10mm on the outer ...

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Abstract

The invention discloses a polycrystalline silicon reduction furnace body. 3-5 layers of metal thermal baffles are arranged in the furnace body; and the multiple layers of metal thermal baffles are fixedly connected together by virtue of stainless steel bolts and are fixed to the inner wall surface of the furnace body in a bolted connection mode. The thermal baffles are made of stainless steel, the shapes of the thermal baffles are consistent with the inner wall of the furnace body, and the interlayer of the thermal baffles is communicated with the inner cavity of the furnace body. According to the polycrystalline silicon reduction furnace body disclosed by the invention, the multiple layers of metal thermal baffles cover polycrystalline silicon bars, so that the heat loss can be greatly reduced, the utilization rate of heat energy in the furnace body is improved, the problem that energy waste is caused because the inner wall of the conventional furnace body is difficult to polish and the polishing effect is poor is solved, and the production cost of the polycrystalline silicon is reduced by virtue of low electric energy and an easily operated technology.

Description

Technical field [0001] The invention relates to a polycrystalline silicon reduction furnace body, in particular to a polycrystalline silicon reduction furnace body suitable for multilayer heat insulation and energy saving. Background technique [0002] With the development of science and technology, the development of the solar photovoltaic industry and the semiconductor industry is becoming more and more rapid. As the main raw material of the solar photovoltaic industry and the semiconductor industry, the industrial demand for polysilicon is also increasing. At present, domestic and foreign polysilicon production enterprises mainly adopt the "modified Siemens method." The production process of this method is to use hydrogen chloride and silicon powder to synthesize trichlorosilane at a certain temperature, and then separate and rectify the trichlorosilane. After the purified high-purity trichlorosilane is mixed with hydrogen in proportion, Pass into the polysilicon reduction fu...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C01B33/03
Inventor 任智铨汪剑江利张腾飞魏婷
Owner SPECIAL EQUIP SAFETY SUPERVISION INSPECTION INST OF JIANGSU PROVINCE
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