Tunnel-type hardening furnace for semiconductor device
A hardening furnace and semiconductor technology, applied in the fields of semiconductor devices, semiconductor/solid-state device manufacturing, electrical components, etc., can solve the problems of inconsistent product quality, low efficiency, uneven heating temperature and time control, and save labor and temperature. effective effect
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[0030] In order to make the object, technical solution and advantages of the present invention more clear and definite, the present invention will be further described below with reference to the accompanying drawings and examples.
[0031] see figure 1 and figure 2 , the equipment provided by the present invention mainly includes: a hardening furnace base 1, a heating platform 2, a conveying mechanism 3, a furnace cover 8 and an electric control platform 9, the heating platform 2 is arranged on the hardening furnace base 1, and is used for semiconductor Device heating; the conveying mechanism 3 is set across the two ends of the heating platform 2, and the semiconductor device is transported to the heating platform 2 through a steel wire as a conveying tool; the furnace cover 8 is arranged on the heating platform 2 for use in the hardening furnace A tunnel-type heating chamber is formed on the base 1; the electric control platform 9 is electrically connected with the heating...
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