A controllable high-frequency response probe test motion device for microwave and millimeter-wave chips

Abstract

The invention discloses a controllable high-frequency response probe testing motion device for microwave and millimeter wave chips, including an industrial computer, a control module, a drive machine, a servo motor, a precision displacement device and a grating ruler. The precision displacement device includes a precision workbench , driver I, piezoelectric ceramics and flexible hinges, the industrial computer is connected to the control module, the control module is connected to the driver, the driver is connected to the servo motor, the servo motor is connected to the driver through the encoder, the servo motor is connected to the precision workbench, the precision workbench is connected to the driver I, and the driver I is connected to the piezoelectric ceramic, the piezoelectric ceramic is connected to the flexible hinge, the flexible hinge is connected to the workbench, the workbench is connected to the control module through the grating ruler, and the driver I is connected to the control module. The existing one-time positioning is changed to the motor driving the screw for coarse positioning. , The precision displacement device is the secondary positioning of fine positioning. The precision positioning system has a fast test speed, greatly shortens the test cycle, improves efficiency and production capacity, and reduces test costs without affecting the test pass rate.

Description

technical field [0001] The invention relates to a controllable high-frequency response probe testing motion device for microwave and millimeter wave chips. Background technique [0002] The development and production of microwave and millimeter wave high-frequency chips is a cutting-edge high-tech industry in the world today, and its application proportion in modern electronic complete machines is also increasing. Chip testing is not only a link in the integrated circuit industry chain, but also the key to verifying the factory . Chip testing is the best tool for analyzing chip defects. Through testing, the yield can be improved and unnecessary losses can be reduced. [0003] After the semiconductor chip is manufactured and before packaging, the chip on the silicon wafer needs to be tested, and a good chip is selected for packaging. The testing process is: put the test probe on the chip, and the test platform gives the input stimulus signal. Compare the actual output of th...

AI Technical Summary

Problems solved by technology

[0017] In order to solve the above problems, the present invention proposes a controllable high-frequency response probe test movement device for microwave and millimeter-wave chips. The problem to be solved is that the contact stress between the probe and the chip is uncontrollable and the variation range Large size, long test time, low test accuracy, difficult test, etc.

Changing the existing one-time positioning to secondary positioning needs to solve the problem of high precision and fast response of microwave and millimeter wave chip probe testing

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