A monolithic integrated six-degree-of-freedom micro inertial measurement unit and its processing method

Abstract

The invention discloses a monolithic integrated six-degree-of-freedom micro-inertial measurement unit and a processing method thereof. The monolithic integrated six-degree-of-freedom micro-inertial measurement unit comprises a main unit structure mounted in the center of a glass substrate in a bonding manner, wherein the main unit structure is square and comprises a triaxial accelerometer unit and a triaxial gyroscope unit; the triaxial gyroscope unit comprises four square frames same in structure; a Z-axis detection structure, a driving structure, a Y-axis detection structure and an X-axis detection structure are connected to the inner side edge of each square frame; the triaxial accelerometer unit comprises a central mass block positioned in the center of the main unit structure and twisting-type mass blocks mounted at four top angles of the main unit structure respectively. The monolithic integrated six-degree-of-freedom micro-inertial measurement unit has the advantages of high measurement precision, strong reliability, high panel utilization rate, full decoupling, small mass, low cost, simple and ingenious volumetric structure and the like, can be used for measuring accelerated speeds and angular speeds in three directions at the same time, and is strong in applicability, thereby having a wide market prospect.

Description

technical field [0001] The invention relates to the field of micro-electromechanical devices, in particular to a single-chip integrated six-degree-of-freedom micro-inertial measurement unit and a processing method thereof. Background technique [0002] The MEMS inertial sensor is a miniaturized sensor that is processed by the MEMS manufacturing technology and is used to measure the inertial parameters (linear acceleration, angular velocity, etc.) of the moving body. It mainly includes a MEMS accelerometer, a MEMS gyroscope and a MEMS inertial measurement combination. Among them, the accelerometer is used to measure the linear acceleration of the object's motion, and the gyroscope is used to measure the angular velocity of the object's rotation. Using the inertial measurement unit (IMU) composed of the accelerometer and the gyroscope, the acceleration and angular velocity of the object can be measured at the same time. After data processing You can get the speed, displacemen...

AI Technical Summary

Problems solved by technology

It adopts the principle of piezoresistive measurement, the temperature stability of the piezoresistive sensor is poor, the sensitivity is low, the full-scale output is small, and it cannot be applied to occasions with high requirements

In 2012, Jiao Jiwei of MEMS Technology Hong Kong Co., Ltd. and others announced a MEMS six-axis sensor composed of a three-axis angular velocity sensor and a three-axis accelerometer that is set in it and coincides with its inertial mass center and is independent of each other. The three-axis inertial sensor, because the three-axis accelerometer and the three-axis gyroscope are integrated together, has a large volume and does not achieve full decoupling

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