A manufacturing method of su-8 glue electro-hydraulic jet needle with nanoscale channels
A SU-8, nano-scale technology, applied in the field of micro-electromechanical research, can solve the problems of high manufacturing cost, difficult processing of electro-hydraulic jet needles, inability to manufacture nano-scale channels below 100nm, and achieve the effect of simple manufacturing process
Active Publication Date: 2018-11-09
DALIAN UNIV OF TECH
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Problems solved by technology
[0005] The technical problem to be solved by the present invention is to propose a micro-nano composite-scale PDMS mold based on a mosaic mask film in view of the difficulty in processing electro-hydraulic jet needles, high manufacturing costs, and the inability to manufacture nanoscale channel nozzles below 100nm. , the fabrication method of electro-hydraulic jet nozzles using thermal embossing and forward UV exposure technology
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[0018] The specific implementation manner of the patent of the present invention will be described in detail below in conjunction with the technical scheme and accompanying drawings.
[0019] figure 1 It is a schematic diagram of the nanoscale channel nozzle thermal embossing-ultraviolet exposure manufacturing method of the present invention.
[0020] Such as figure 1 As shown, the production process steps are as follows:
[0021] (a) After the two-dimensional nano-silicon mold 1 whose depth and width scales are all below 100 nm is cleaned by a standard cleaning solution, it is modified with dimethyldichlorosilane to increase the hydrophobicity of the surface of the mold. Then pour PDMS 2, the ratio of the first layer of PDMS curing agent is 5:1, and the pouring thickness is controlled between 200 μm and 500 μm. After vacuuming to remove the air bubbles in the PDMS, the first layer of PDMS with nanoscale needle patterns was cured at a curing temperature of 40°C and a curing...
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Abstract
The invention discloses a hot stamping and ultraviolet exposure manufacturing method of an SU-8 photoresist electrohydrodynamic jet nozzle needle provided with a nanoscale channel. The method comprises the steps of manufacturing a micro-nanoscale composite PDMS (Polydimethylsiloxane) die embedded with a mask film by a twice PDMS casting and oxygen plasma treatment method, photoetching a BP212 sacrificial layer on a silicon wafer, evaporating an Al layer as a screening layer, spincoating an SU-8 photoresist, manufacturing the SU-8 photoresist nozzle needle provided with the nanoscale channel by a hot stamping and forward ultraviolet exposure method with the micro-nanoscale composite PDMS die, performing bonding, removing the Al screening layer and the BP212 sacrificial layer to allow the front part of a needle tip of the SU-8 photoresist nozzle needle to be overhung, and forming the front part overhung SU-8 photoresist nozzle needle provided with the nanoscale channel. The method is simple in preparation technology, low in cost, good in technology repeatability and easy to realize.
Description
technical field [0001] The invention relates to the field of micro-electromechanical research, in particular to an electro-hydraulic power jet nozzle manufacturing method based on hot embossing-ultraviolet exposure technology. Background technique [0002] Nanostructured devices can be widely used in the fields of biology, chemistry and electronics, mainly relying on the flexible, simple, low-cost and practical nanostructure fabrication technology. Electrohydrodynamic-jet (EHD-jet) printing is a technology that uses solution to directly print micro / nano patterns, which has the advantages of on-demand additive, low-cost high-resolution, and large-area rapid and flexible manufacturing. The electro-hydraulic power jet printing technology uses electric field force to drive liquid ink to flow through the electro-hydraulic power jet needle to generate a jet, so as to realize direct printing and writing of graphics on the substrate. The electro-hydraulic dynamic jet has a scale ef...
Claims
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IPC IPC(8): G03F7/00
Inventor 邹赫麟殷志富孙蕾
Owner DALIAN UNIV OF TECH