Method for rapid detection of SiO2 film thickness and film compact

A compactness and testing method technology, which is applied in the field of rapid detection of SiO2 film thickness and film compactness, can solve the problems of inability to test film thickness and inability to evaluate film compactness, so as to improve test efficiency, increase production capacity, reduce pollution effect

Inactive Publication Date: 2015-08-26
安徽立光电子材料股份有限公司
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Problems solved by technology

[0003] At present, most of the industry uses oil-based pens to make samples for coating. After the completion, erase the marks of the oil-based pen to make steps. The depth of the test steps is the physical film thickness. Ho

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  • Method for rapid detection of SiO2 film thickness and film compact

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Embodiment Construction

[0021] In order to make the technical means, creative features, goals and effects achieved by the present invention easy to understand, the present invention will be further elaborated below in conjunction with specific embodiments and accompanying drawings, but the following embodiments are only preferred embodiments of the present invention, not all . Based on the examples in the implementation manners, other examples obtained by those skilled in the art without making creative efforts all belong to the protection scope of the present invention.

[0022] A rapid detection of SiO 2 The method of film thickness and film compactness, the test method steps are as follows:

[0023] 1) Acid solution preparation

[0024] Select analytically pure, the preparation ratio is HF:HNO 3 : DI water=2.4%: 1.6%: 96%, store the configured acid solution in a plastic cup;

[0025] 2) Step production (such as figure 1 shown)

[0026] Cut the sample to be tested into small pieces, and paste...

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Abstract

The invention provides a method for rapid detection of SiO2 film thickness and film compact, and relates to the technical field of glass detection. The detection method is as follows: 1) preparing an acidic solution containing HF, HNO3 and DI water in a ratio of 2.4%:1.6%:96%, and storing the acidic solution in a plastic cup; 2) cutting a sample to be tested into small pieces, and attaching two parallel tapes with spacing of 1mm to the surface to form a step, compacting the tapes along the same direction and keeping the step edges smooth; 3) heating a water bath, setting the temperature to 30 DEG C, and heating the plastic cup filled with acidic solution in the water bath; and confirming the temperature of the acidic solution reaching 30+/-2 DEG C; and 4) soaking the step into the acidic solution with specified temperature, and detecting the etching rate at the soak time of 50s, 70s, 90s and 110s. The method can directly use adverse glass in the production line in the production process for test again, does not need an oil pen line for production of sample steps, and greatly improves test efficiency and productivity.

Description

technical field [0001] The invention relates to the technical field of rapid detection of film thickness and film compactness in the industrial production of magnetron sputtering coating, in particular to a rapid detection of SiO 2 The method of film thickness and film compactness. Background technique [0002] With the rapid development of the electronic information industry, smart home applications are becoming more and more extensive, and more and more instruments are used in home appliance displays. Generally, LCD liquid crystal display and touch products need to be covered with a layer of SiO before plating ITO. 2 The film can prevent the precipitation of sodium ions and enhance the adhesion. In industrial production, oil-based pens are used to make steps to test the physical properties and film thickness. [0003] At present, most of the industry uses oil-based pens to make samples for coating. After the completion, erase the marks of the oil-based pen to make steps. ...

Claims

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Application Information

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IPC IPC(8): G01N17/00
Inventor 胡超川傅强李加海朱磊金艳芳王丹
Owner 安徽立光电子材料股份有限公司
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