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Nitrogen oxide sensor chip and preparation method thereof

A sensor chip, nitrogen oxide technology, applied in the direction of material electrochemical variables, can solve problems such as cost increase and signal interference, and achieve the effects of simplified structure, simplified preparation process, and simple structure

Active Publication Date: 2015-09-23
WUHAN CUBIC OPTOELECTRONICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

But this new type of nitrogen oxide sensor still has deficiencies: this new type of nitrogen oxide sensor still has problems in the selection of electrode materials, which makes its signal extremely susceptible to interference from carbon monoxide and hydrocarbons in automobile exhaust; this new type There is no oxygen sensor integrated on the substrate of the nitrogen oxide sensor, but it needs to work with the cooperation of the oxygen sensor, resulting in an increase in cost during actual use

Method used

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  • Nitrogen oxide sensor chip and preparation method thereof
  • Nitrogen oxide sensor chip and preparation method thereof
  • Nitrogen oxide sensor chip and preparation method thereof

Examples

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Effect test

Embodiment 1

[0042] A nitrogen oxide sensor chip and a preparation method thereof. The nitrogen oxide sensor chip integrates a heating resistor 1 , a nitrogen oxide concentration battery 2 and an STF oxygen sensitive resistor 3 on the surface of an alumina substrate 4 . The projection positions of the heating resistor 1, the nitrogen oxide concentration cell 2 and the STF oxygen sensitive resistor 3 on the alumina substrate 4 are as follows: figure 1 As shown: the heating resistor 1 is symmetrically distributed near the periphery of the alumina substrate 4; the distance between the center of the nitrogen oxide concentration cell 2 and the left end of the alumina substrate 4 is 4 mm; the center of the STF oxygen-sensitive resistor 3 and the alumina substrate The distance between the left ends of the sheet 4 is 10 mm; the center of the nitrogen oxide concentration cell 2 and the center of the STF oxygen sensitive resistor 3 are located on the symmetry line of the alumina substrate 4 .

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Embodiment 2

[0063] A nitrogen oxide sensor chip and a preparation method thereof. Except the following circumstances, all the other are with embodiment 1:

[0064] This example Figure 7 As shown, the heating resistors 1 are symmetrically distributed near the periphery of the alumina substrate 4 means that the heating resistors 1 are symmetrically distributed near the periphery of the back surface of the alumina substrate 4 .

[0065] This example Figure 6 and Figure 7 As shown, the planar shape of the alumina substrate 4 is a rectangle

[0066] Compared with the prior art, this specific embodiment has the following positive effects:

[0067] 1. The structure of the nitrogen oxide sensor chip in this specific embodiment is simple. At present, the exhaust gas nitrogen oxide sensor chip for vehicles is composed of six layers of zirconia substrates, consisting of three electrochemical oxygen pumps, two chambers, a reference air channel, a heating resistor, leads and eight ...

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Abstract

The present invention relates to a nitrogen oxide sensor chip and preparation method thereof. A technical scheme is as below: a silk-screen printing mode is employed to print each component of a heating resistor (1), a nitrogen oxide concentration cell (2) and an STF oxygen-sensitive resistor (3) on an alumina substrate sheet (4) surface by using corresponding slurry; and after each printing, a corresponding process is used for sintering, so as to obtain the nitrogen oxide sensor chip. Compared with the prior art, the nitrogen oxide sensor chip prepared by the invention has the characteristics of simple preparation and low cost; and the prepared nitrogen oxide sensor chip has good measuring effect and can simultaneously measure the nitrogen oxide content and oxygen content.

Description

technical field [0001] The invention belongs to the technical field of automobile tail gas nitrogen oxide sensors. In particular, it relates to a nitrogen oxide sensor chip and a preparation method thereof. Background technique [0002] At present, the exhaust gas nitrogen oxide sensor chip for vehicles is composed of six layers of zirconia substrates, such as the patented technology of "gas sensor, nitrogen oxide sensor and method for manufacturing gas sensor" (US20090242400) and "calibration of nitrogen oxide sensor The method of output signal" (US20080237064) patent technology, the patent technology is composed of three electrochemical oxygen pumps, two chambers, a reference air channel, a heating resistor, lead wires and eight pins, three electric The chemical oxygen pumps are the main pump, the auxiliary pump and the measuring pump respectively. The main pump is in the first chamber, the auxiliary pump and the measuring pump are in the second chamber, and the first cha...

Claims

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Application Information

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IPC IPC(8): G01N27/26
Inventor 赵芃谢光远王文长曹昊赵海吉
Owner WUHAN CUBIC OPTOELECTRONICS
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