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Air-suspending vibration signal inhibition-based method and system

A technology of vibration signal and air suspension, applied in the direction of shafts and bearings, bearings, bearing components, etc., can solve the problem of long positioning stability time

Active Publication Date: 2015-10-28
INST OF INTELLIGENT MFG GUANGDONG ACAD OF SCI
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Problems solved by technology

However, due to the direct drive of the air-floating motion system, the nearly zero friction (very small damping), the mechanical characteristics of the weak link of the parallel decoupling mechanism, and the motion characteristics of high-acceleration and high-speed operation, mechanical resonance and residual vibration will inevitably occur. The main factor affecting the fast and high-precision positioning of the air suspension motion system, the most intuitive manifestation is that the system positioning stabilization time is too long (hundreds of milliseconds)

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Embodiment Construction

[0066] The method and system for suppressing vibration signals based on air suspension according to the present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0067] The following are the best examples of the method and system based on air suspension vibration signal suppression in the present invention, which do not limit the protection scope of the present invention.

[0068] A method for suppressing vibration signals based on air suspension, comprising the following steps:

[0069] S1, collecting the vibration signal of the air suspension system;

[0070] S2. Perform digital filtering, denoising and spectrum analysis on the collected vibration signal to obtain the vibration frequency of the air suspension system;

[0071] S3, establish the open-loop transfer function of the Y motion axis voltage command-displacement of the kinematic system of the air suspension system:

[0072] G ...

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Abstract

The invention relates to an air-suspending vibration signal inhibition-based method and system, a vibration signal of an air-suspending system and damping rate are analyzed by inputting designed improved negative pulse into a reshaper, a pulse sequence is obtained, the pulse sequence and a certain value of expectation are input to phase convolution to obtain a corresponding command and serve as motion system input of the air-suspending system, and inhibition of an air-suspending vibration signal is realized; the method has the advantages of improving rise time of the system and reducing the delay of motion response time of the system besides the characteristic of effectively inhibiting residual vibration of the air-suspending motion system, the improved negative pulse is input to the reshaper to obtain shorter delay time, and pulse number in the pulse sequence can be flexibly selected.

Description

technical field [0001] The invention relates to the field of air suspension sports, and more specifically, relates to a method and system based on air suspension vibration signal suppression. Background technique [0002] The air-suspension lubrication support motion system is a mainstream component of ultra-precision equipment, and has broad prospects for application in the field of ultra-high acceleration, and has gradually become one of the technologies used by international mainstream IC packaging equipment manufacturers. [0003] Compared with the contact kinematic pair, the air suspension kinematic pair has the following advantages: the friction between the kinematic pair is very small, the motion performance and motion accuracy of the servo system are significantly improved; there is no wear, no pollution, and no seepage between the moving parts. Leakage, no heat, the service life of the mechanism is improved, and the maintenance cost of the system is reduced; the pro...

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Application Information

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IPC IPC(8): F16C32/06F16C41/00
Inventor 张昱戴柒叁李习峰
Owner INST OF INTELLIGENT MFG GUANGDONG ACAD OF SCI
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