Micro needle tip with orientation structure and method thereof for continuously conveying liquid
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- SHENZHEN TSIMEC CO LTD
- Publication Date
- 2015-11-11
Smart Images
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Abstract
Description
technical field
[0001] The invention belongs to the technical field of micro-nano manufacturing, and in particular relates to a micro-needle tip with an orientation structure and a method for continuously transporting liquid thereof. Background technique
[0002] In today's era, a large number of electromechanical devices are developing in the direction of miniaturization, which makes various devices integrate more functions while being lightweight and portable. The miniaturization of devices puts forward higher requirements for related technologies such as manufacturing, packaging, and testing. Photolithography technology can produce microstructures with a minimum size of about 1 micron. Electron beam exposure technology further improves the resolution and can produce nanostructures with a scale of tens of nanometers. However, these traditional top-down manufacturing methods have certain limitations, such as the complicated process of manufacturing three-dimensional struct...