Mask plate for vacuum thermal evaporation of oled material

Abstract

The present invention provides a mask for the OLED material vacuum steaming plating, including the mask frame (1), the cutting (3) fixed on the mask frame (1), and fixed in the plug (3) The mask (5) on the top (5); the mask frame (1) includes the four edges, the opening of the four sides of the edge (5);5) The surface of one side is defined as the upper surface, and one groove (11) is set on each side of the mask frame (1);The upper surface of the plug (3) is on the same plane as the top surface of the groove (11); the mask (5) is fixed on the cutting (3) through the point welding, and the solder joint (7) is located onThe width of the upper surface of the plug (3); the width of the upper surface of the cutting (3) is less than the width in the groove (11).

Description

technical field [0001] The invention relates to the field of manufacturing organic light-emitting diode displays, in particular to a mask plate for vacuum thermal evaporation of OLED materials. Background technique [0002] Organic light emitting diode display (Organic Light Emitting Diode, OLED) is a promising flat panel display technology, it has very excellent display performance, especially self-illumination, simple structure, ultra-thin, fast response, wide Viewing angle, low power consumption, and flexible display are known as "dream display". In addition, the investment in its production equipment is much smaller than that of TFT-LCD. It has been favored by major display manufacturers and has become the No. 1 display technology in the field of display technology. The main force of the three generations of display devices. At present, OLED is on the eve of mass production. With the further deepening of research and the continuous emergence of new technologies, OLED di...

AI Technical Summary

Problems solved by technology

At the same time, at the original spot welding position, the heat during welding is equivalent to heat-treating the spot welding position, resulting in an increase in the hardness of the spot welding position, so this layer of hardened layer also needs to be ground and removed so as not to affect the next mask. The spot welding effect, each time the welding surface of the mask frame is polished, it will consume a certain thickness (0.1-1mm)

[0006] In such a case, as figure 2 , image 3 As shown, after the mask is replaced many times, the mask frame 100 will be polished for many times, the thickness will gradually become thinner, and the middle part will sag, which will not only affect the structural strength of the frame, but also have a certain gap between the substrate and the mask during use, which will also affect the The alignment position of the mask 200 in the evaporation equipment leads to poor quality such as color mixing of OLED light-emitting elements

Therefore, the mask frame needs to be scrapped after grinding and polishing to a certain thickness, and the mask frame needs to be transported to a manufacturer with a large polishing machine for grinding and polishing, which is time-consuming, so it is necessary to make multiple mask frames for backup, resulting in production costs Increase

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