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Silver-aluminum alloy crystal oscillation wafer coating process

A silver-aluminum alloy and crystal oscillator technology, which is applied in metal material coating process, sputtering plating, ion implantation plating, etc., can solve the problem of difficult control of composition ratio, the content ratio of quartz sheet cannot reach the predetermined value, silver, The performance of aluminum alloy can not meet the needs and other problems, to achieve the effect of small impedance

Inactive Publication Date: 2015-11-25
ZHONGSHAN TAIWEI ELECTRONICS CO LTD
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  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

It is difficult to control the composition ratio of silver and aluminum evaporated in the above evaporation process, so the content ratio of silver and aluminum alloy on the quartz sheet often does not reach the predetermined value, resulting in the performance of silver and aluminum alloy not meeting the required requirements

Method used

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  • Silver-aluminum alloy crystal oscillation wafer coating process

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Embodiment Construction

[0020] refer to figure 1 , the invention discloses a silver-aluminum alloy crystal vibrator film coating process, comprising the following steps:

[0021] Step 1: Prepare aluminum targets, silver targets and quartz sheets that need to be coated. In this process, both aluminum targets and silver targets must be made of pure aluminum or pure silver. Mixed metals cannot be used as targets.

[0022] Step 2, placing the aluminum target, silver target and quartz sheet in the magnetron sputtering coating equipment, the coating working area in the magnetron sputtering coating equipment is filled with high-purity argon gas, and the magnetron sputtering coating The coating equipment includes an ion emission device for emitting high-energy particles and a transmission device for moving the quartz sheet. The magnetron sputtering coating equipment is an outsourced equipment, and its structure will not be described in detail here, but both sides of the quartz sheet are An ion emission devi...

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Abstract

The invention discloses a silver-aluminum alloy crystal oscillation wafer coating process, a silver-aluminum alloy film formed on a quartz plate through the process can be firmly combined with the quartz plate, a proportion of silver and aluminum components in the silver-aluminum alloy film can be precisely controlled, therefore, various performances of the final finished product silver-aluminum alloy crystal oscillation wafer can achieve the desired setting on the basis of meeting basic use requirements, and the silver-aluminum alloy crystal oscillation wafer has desired radiation, conductivity, smaller impedance and hardness.

Description

technical field [0001] The invention relates to a coating process, in particular to an alloy coating process for a silver-aluminum alloy crystal oscillator. Background technique [0002] Metal conductive film is plated on the quartz plate. The materials used for the metal conductive film are mainly gold, silver, aluminum and copper. The crystal oscillator with aluminum as the conductive layer has the best stress resistance effect, but the material of aluminum is too large. Soft, easy to scratch and oxidize, and compared with gold, silver and copper, aluminum has a high resistance and low electrical and thermal conductivity. [0003] The use of silver-aluminum alloy not only improves the anti-stress effect of the crystal oscillator, but also overcomes the shortcomings of the aluminum crystal oscillator, such as large impedance, low electrical conductivity and thermal conductivity, [0004] The traditional silver-aluminum alloy coating process is to put silver and aluminum in...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/35C23C14/18
CPCC23C14/35H03H9/19
Inventor 肖共和陈愿勤
Owner ZHONGSHAN TAIWEI ELECTRONICS CO LTD