Silver-aluminum alloy crystal oscillation wafer coating process
A silver-aluminum alloy and crystal oscillator technology, which is applied in metal material coating process, sputtering plating, ion implantation plating, etc., can solve the problem of difficult control of composition ratio, the content ratio of quartz sheet cannot reach the predetermined value, silver, The performance of aluminum alloy can not meet the needs and other problems, to achieve the effect of small impedance
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[0020] refer to figure 1 , the invention discloses a silver-aluminum alloy crystal vibrator film coating process, comprising the following steps:
[0021] Step 1: Prepare aluminum targets, silver targets and quartz sheets that need to be coated. In this process, both aluminum targets and silver targets must be made of pure aluminum or pure silver. Mixed metals cannot be used as targets.
[0022] Step 2, placing the aluminum target, silver target and quartz sheet in the magnetron sputtering coating equipment, the coating working area in the magnetron sputtering coating equipment is filled with high-purity argon gas, and the magnetron sputtering coating The coating equipment includes an ion emission device for emitting high-energy particles and a transmission device for moving the quartz sheet. The magnetron sputtering coating equipment is an outsourced equipment, and its structure will not be described in detail here, but both sides of the quartz sheet are An ion emission devi...
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