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Preparation method of flexible pressure sensor having high sensitivity

A pressure sensor, a flexible technology, applied in the direction of fluid pressure measurement by changing the ohmic resistance, can solve the problems of long relaxation time, failure to return to the original state, and restriction of composite materials, so as to simplify the structure and preparation steps, facilitate operation, eliminate The effect of creep

Inactive Publication Date: 2015-12-09
NINGBO GREENTECH ENERGY SAVING TECH
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AI Technical Summary

Problems solved by technology

For common pressure sensors, the main reason for restricting their sensitivity is that the composite material does not fully exhibit elastic behavior, creeps under the action of external force, and has a long relaxation time, and cannot quickly return to its original state after the external force disappears.
This makes the sensor unable to respond quickly to external forces, affecting the sensitivity and accuracy of detection

Method used

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  • Preparation method of flexible pressure sensor having high sensitivity
  • Preparation method of flexible pressure sensor having high sensitivity
  • Preparation method of flexible pressure sensor having high sensitivity

Examples

Experimental program
Comparison scheme
Effect test

Embodiment

[0039] Preparation of the flexible pressure sensor:

[0040] (1) Disperse multi-walled carbon nanotubes (CNTs) with a diameter of 110–190 nm and a length of 5–9 μm in chloroform, and ultrasonicate for 6 hours to obtain a CNT suspension with good dispersibility.

[0041] (2) Mix the CNT suspension and the PDMS base solution completely in a vortex mixer, then spin evaporate at 90°C for 6h to remove the solvent chloroform, and obtain a mixture of PDMS and CNT.

[0042] (3) Hexane and curing agent were mixed at a ratio of 1:10 and added to the above PDMS-CNT mixture. The ratio was 500 mg of PDMS and 1 mL of hexane. Stir for 5 minutes to make it completely mixed, and degas under vacuum to remove air bubbles.

[0043] (4) Take 100 μL of the above mixed liquid and hang-coat it on the micro-template at 600 rpm with a thickness of about 500 μm, and cure at 90°C for 3 hours. The template is obtained by photoetching a silicon wafer, and its surface has periodically arranged inverted tr...

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Abstract

The invention discloses a preparation method of a flexible pressure sensor based on a carbon nanotube and a high-molecular polymer. According to the preparation method, the carbon nanotube is doped in a polymer substrate, thereby obtaining an elastomer material having electrical conductivity; and an electrode and a composite material are assembled, thereby building a flexible pressure sensor. After a circuit is accessed, the conductive elastomer converts self-deformation into a resistance change under the function of external force, and detection of pressure is realized through measurement of an electrical signal. A microcosmic structure of the surface of the elastomer material is modified, unique surface appearance enables the elastomer material to only present elastic behavior, but creepage does not occur, and a rapid response can be made to pressure applied by the outside world, thereby greatly improving sensitivity of the sensor.

Description

technical field [0001] The invention relates to a preparation method of a pressure sensor, in particular to a preparation method of a flexible pressure sensor based on carbon nanotubes and high molecular polymers. Background technique [0002] Pressure sensors are widely used in wearable devices and other electronic products, such as home appliances, robots, medical equipment, safety devices, environmental monitoring equipment, etc. With the increase of types of wearable devices, the emergence of industries such as health data monitoring and telemedicine, there are higher requirements for the sensitivity and accuracy of flexible pressure sensors in practical applications. [0003] The current common fabrication method for flexible pressure sensors is to assemble conductive materials with flexible substrates. The prepared composite material undergoes a certain deformation under external pressure and stress, resulting in a change in its resistance or capacitance, thereby caus...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L9/02
Inventor 夏抒
Owner NINGBO GREENTECH ENERGY SAVING TECH
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