A dual-frequency multi-channel simultaneous detection method for electrical domain imaging
A synchronous detection and multi-channel technology, applied in the direction of measuring devices, instruments, scanning probe microscopy, etc., can solve the problem that the excitation signal is difficult to high-resolution imaging, etc., to improve the detection accuracy, resolution, and signal The effect of the noise ratio
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[0018] The present invention will be described in further detail below in conjunction with the accompanying drawings and embodiments.
[0019] In this embodiment, the atomic force microscope used to detect the sample is a commercial scanning probe microscope, and the PFM module is composed of two lock-in amplifiers, two frequency sources (function generators), and a program-controlled computer, wherein the lock-in amplifier is a dual-phase lock-in amplifier. The probes for scanning and imaging on the sample surface are μMasch series Pt-coated Si conductive tips. To detect bismuth ferrite (BiFeO 3 ) film sample as an example, combined with the test system structure of electric domain imaging synchronous detection, such as figure 1 As shown, the specific measurement steps are as follows:
[0020] 1. Bismuth ferrite (BiFeO) with a bottom electrode 3 ) The thin film sample is placed on the sample stage of the atomic force microscope, and the conductive probe is used to contact...
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