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Multiple reflection type laser con-focal long focal length measuring method and device

A technology of multiple reflection and measurement devices, which is applied in the direction of testing optical performance, etc., can solve the problems of high-precision measurement of the focal length of long focal length lenses, improve the ability to resist environmental interference and system reliability, reduce the impact of measurement accuracy, reduce The effect of measuring distance

Active Publication Date: 2015-12-23
BEIJING INSTITUTE OF TECHNOLOGYGY
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Problems solved by technology

[0011] The purpose of the present invention is to solve the problem of high-precision measurement of the focal length of a long focal length lens, and propose a method and device for measuring a multiple reflection laser confocal long focal length

Method used

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  • Multiple reflection type laser con-focal long focal length measuring method and device
  • Multiple reflection type laser con-focal long focal length measuring method and device
  • Multiple reflection type laser con-focal long focal length measuring method and device

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Embodiment 1

[0041] like figure 2 As shown, the embodiment of the present invention is based on figure 1 The schematic diagram of the multi-reflection laser confocal long-focus measurement system shown can also include: a main control computer 17, an image acquisition card 18, an electromechanical control device 19, a linear translation guide rail 20, an adjustment frame 21, an adjustment frame 22 and an adjustment Rack 23. Wherein, the point light source 1 may be composed of a laser 18 and an optical fiber 19 , and the confocal detection system 10 may be composed of a light intensity sensor 12 and a pinhole 11 .

[0042] like figure 2 As shown, the process of using the multi-reflection laser confocal long focal length measurement device to achieve high-precision measurement of the focal length of the long focal length lens is as follows: the light emitted by the point light source 1 passes through the beam splitter 2 and the collimator lens 3 to form a collimated beam and irradiates ...

Embodiment 2

[0054] like figure 2 As shown, taking n=4 reflections and n=3 reflections in sequence as an example:

[0055] When the measured lens 5 adopts a plano-convex lens with a diameter of D=150mm, its convex surface curvature radius r=4998.8608mm, the used parallel flat crystal 6 thickness b=10mm, and the refractive index n=1.5146mm, it is measured that the measured mirror 5 and the parallel flat crystal When the distance between crystals 6 is d=319.62mm, and the plane faces the direction of collimated light, the multi-reflection laser confocal long focal length measuring device such as figure 2 As shown, the measurement steps are:

[0056] Step 1. Place the reflector 9 in the collimated optical path behind the collimator 3, and adjust the adjustment frame 21 by using the self-collimation method to make the reflector 9 coaxial with the collimated light beam;

[0057] Step 2, placing the parallel flat crystal 6 in the collimated optical path behind the collimating mirror 3, and ad...

Embodiment 3

[0064] like image 3 As shown, taking n=5 reflections and n=6 reflections in sequence as an example:

[0065] When the measured lens 5 adopts a plano-convex lens with a diameter of D=150mm, its convex surface curvature radius r=4998.8608mm, the thickness of the parallel flat crystal 6 used is b=10mm, and the refractive index n=1.5146mm, the measured mirror 5 and the parallel flat crystal 6 When the interval d=319.62mm, and the plane faces the direction of collimated light, the measurement steps are:

[0066] Step 1. Place the reflector 9 in the collimated optical path behind the collimator 3, and adjust the adjustment frame 21 by using the self-collimation method to make the reflector 9 coaxial with the collimated light beam;

[0067] Step 2, placing the parallel flat crystal 6 in the collimated optical path behind the collimating mirror 3, and adjusting the adjustment frame 22 by using the self-collimation method to make the parallel flat crystal 6 coaxial with the collimate...

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Abstract

The invention relates to a multiple reflection type laser con-focal long focal length measuring method and device, and belongs to the technical field of optical precise measurement. An optical parallel and a reflector are arranged behind a measured lens to realize multiple reflection of a focused light beam, the characteristic that the maximum value point accurately corresponds to a convergent point in a laser con-focal light intensity response curve is utilized, the convergent points of different reflection times after multiple reciprocation are focused in high precision, position information of the reflector is accurately measured via a length measuring interferometer, and the long focal length can be measured in high precision. The con-focal fixed-focal principle is combined with the multiple reflection type reciprocation principle in the method, the measuring optical path is greatly reduced, the measuring distance is reduced, the measuring optical path is simplified, instrument structures are reduced, resistant to environmental interference is improved, and the method and device can be applied to high-precision focal length measurement for long-focal-length lenses or optical systems.

Description

technical field [0001] The invention relates to a multi-reflection laser confocal long focal length measurement method and device, belonging to the technical field of precision measurement of optical element parameters. technical background [0002] Long focal length optical components are widely used in the research fields of large optical systems such as laser nuclear fusion, space optical systems and high energy lasers. However, the high-precision measurement of the focal length of long focal length lenses has always been a major problem in the field of optical testing, and its measurement accuracy also directly affects the imaging quality and performance of large optical systems. Therefore, finding a high-precision measurement method with a long focal length has very important application value, and it is also a technical bottleneck to be solved urgently in the development and installation of major national projects such as laser nuclear fusion, space optical instruments...

Claims

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Application Information

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IPC IPC(8): G01M11/02
Inventor 赵维谦李志刚王允
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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