Polymer irradiation damage test device and test method

Abstract

The invention discloses a test device and a test method for polymer irradiation damage. The device comprises a light source chamber, a light path chamber and a sample chamber which are independent from one another, wherein a light path transmission component and an optical detection component are arranged in the light path chamber; the light path transmission component comprises a light beam attenuator, a light beam homogenizer, a shutter, a focusing lens, a first beam splitter and a second beam splitter; the optical detection component comprises an energy meter and a light beam quality analyzer, and is used for testing the energy of a light beam at the position and the area of a light spot at the position so as to obtain the energy density irradiated to a sample; a sample seat, the sample and a mass spectrograph are arranged in the sample chamber; the sample seat is provided with a three-dimensional adjustment device for performing x, y and z-axial three-dimensional adjustment on the sample seat; the mass spectrograph is used for testing a gas component in the sample chamber on line so as to monitor and judge whether the sample has the irradiation damage in real time, and analyzing a fragment gas component generated by the irradiation damage to the sample.

Description

technical field [0001] The invention relates to a material radiation damage test device and a test method, in particular to an excimer laser radiation damage test device and a test method for polymer materials, belonging to the technical field of material performance testing. Background technique [0002] Laser application systems (such as lithography machines) use various types of materials. Laser light is directly or scattered on the surface of the material, which may cause radiation damage to the material, thereby causing functional failure of the material. Some short-wavelength lasers (such as excimer lasers) have high peak power, high single-photon energy, and high absorption rate of materials, which can directly break the chemical bonds of some polymers, and some gas fragments generated will pollute the optical system. , affecting the lithography performance. Therefore, it is necessary to accurately obtain the radiation damage threshold of the polymer, analyze the gas...

AI Technical Summary

Problems solved by technology

[0003] figure 1 It is a schematic structural diagram of a typical laser damage testing device for optical thin films in the prior art. It is a laser damage testing device for optical thin films based on optical microscopic imaging and polarization attenuation. However, this device cannot detect the radiation damage of samples in real time, so it is obtained There will be certain errors in the damage threshold; and the device cannot qualitatively and quantitatively analyze the gas fragment components produced by the polymer radiation damage in real time

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