Polymer irradiation damage test device and test method

A technology of radiation damage and testing device, applied in the field of material performance testing, can solve the problems of damage threshold error, inability to detect radiation damage in real time, and inability to qualitatively and quantitatively analyze the composition of gas fragments in real time, so as to reduce energy Attenuation and test error, accurately test the effect of irradiation energy density

Inactive Publication Date: 2016-01-06
ACAD OF OPTO ELECTRONICS CHINESE ACAD OF SCI
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Problems solved by technology

[0003] figure 1 It is a schematic structural diagram of a typical laser damage testing device for optical thin films in the prior art. It is a laser damage testing device for optical thin films based on optical microscopic imaging and polarization attenuation. However, this devi

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  • Polymer irradiation damage test device and test method
  • Polymer irradiation damage test device and test method
  • Polymer irradiation damage test device and test method

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Embodiment Construction

[0018] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0019] Such as figure 2 As shown, a test device for polymer radiation damage proposed by the present invention includes three relatively independent chambers, which are respectively a light source chamber 1, an optical path chamber 2 and a sample chamber 3, wherein the optical path chamber 2 and the sample chamber 3 is a vacuum chamber, and the above three chambers are separated by a flange window 4, and the window is CaF 2 The material can pass through the excimer laser, and its transmittance is T 4 ,T 4 Usually above 99.9%.

[0020] The excimer laser light source used for irradiation is accommodated in the described light source chamber 1, and it is used to produce the excimer laser of predetermined wavelength, is p...

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Abstract

The invention discloses a test device and a test method for polymer irradiation damage. The device comprises a light source chamber, a light path chamber and a sample chamber which are independent from one another, wherein a light path transmission component and an optical detection component are arranged in the light path chamber; the light path transmission component comprises a light beam attenuator, a light beam homogenizer, a shutter, a focusing lens, a first beam splitter and a second beam splitter; the optical detection component comprises an energy meter and a light beam quality analyzer, and is used for testing the energy of a light beam at the position and the area of a light spot at the position so as to obtain the energy density irradiated to a sample; a sample seat, the sample and a mass spectrograph are arranged in the sample chamber; the sample seat is provided with a three-dimensional adjustment device for performing x, y and z-axial three-dimensional adjustment on the sample seat; the mass spectrograph is used for testing a gas component in the sample chamber on line so as to monitor and judge whether the sample has the irradiation damage in real time, and analyzing a fragment gas component generated by the irradiation damage to the sample.

Description

technical field [0001] The invention relates to a material radiation damage test device and a test method, in particular to an excimer laser radiation damage test device and a test method for polymer materials, belonging to the technical field of material performance testing. Background technique [0002] Laser application systems (such as lithography machines) use various types of materials. Laser light is directly or scattered on the surface of the material, which may cause radiation damage to the material, thereby causing functional failure of the material. Some short-wavelength lasers (such as excimer lasers) have high peak power, high single-photon energy, and high absorption rate of materials, which can directly break the chemical bonds of some polymers, and some gas fragments generated will pollute the optical system. , affecting the lithography performance. Therefore, it is necessary to accurately obtain the radiation damage threshold of the polymer, analyze the gas...

Claims

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Application Information

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IPC IPC(8): G01N17/00
Inventor 罗艳吴晓斌周翊陈进新王魁波谢婉露张罗莎
Owner ACAD OF OPTO ELECTRONICS CHINESE ACAD OF SCI
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