A parallel macro-micro high-precision motion platform

Abstract

The invention belongs to the technical field of machine designing and manufacturing and particularly relates to a parallel type macro-micro high-precision movement platform. The parallel type macro-micro high-precision movement platform is characterized in that a first linear driving system and a second linear driving system are parallel to each other and are symmetrically fixed to the front side and the rear side of the plane of a base (1) respectively; a terminal platform (2) is in a Y shape, and the three top ends of the terminal platform are connected with one ends of three identical branched chains respectively; the other end of the first branched chain and the other end of the second branched chain are hinged to a first linear feeding platform (17); the other end of the third branched chain is hinged to a second linear feeding platform (35); the two linear feeding platforms are connected with linear guide rails of the systems of the two linear feeding platforms respectively through guide rail sliding blocks; linear grating rulers are parallel to the linear guide rails; a plane grating (54) is fixedly installed on the base (1); flexible hinge units are embedded into the branches chains; a pressure sensor is fixedly installed at the tail end of a piezoelectric ceramic actuator. According to the parallel type macro-micro high-precision movement platform, a flexible unit design mode of input decoupling is adopted, and the parallel type macro-micro high-precision movement platform has the characteristics of being high in movement precision and high in resolution ratio.

Description

technical field [0001] The invention belongs to the technical field of mechanical design and manufacture, and in particular relates to a parallel macro-micro high-precision motion platform. Background technique [0002] With the development of modern science and technology, the demand for large-scale motion platforms with high precision and resolution is becoming more and more urgent. Such platforms are used in fields such as IC manufacturing equipment, ultra-precision machining and measurement, biomedical engineering, and aerospace. have wide applications. [0003] Traditional large-scale precision motion platforms are generally driven by servo motors and precision ball screw drives, and some are directly driven by linear motors. The transmission parts of this type of motion platform inevitably have gaps, nonlinear friction, temperature rise, wear, etc. during the motion process, so it is difficult to obtain high motion accuracy, which is generally limited to the micron le...

AI Technical Summary

Problems solved by technology

This form of macro-micro platform can achieve high motion accuracy and resolution in a large-scale range, but the macro-micro platform in the form of series superposition has disadvantages such as weak carrying capacity, low natural frequency, and motion error coupling. For occasions with light load and lower requirements on dynamic characteristics

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