Machining method for high-accuracy metal mask plate

Abstract

The invention relates to a machining method for a high-accuracy metal mask plate. The machining method includes the steps that a metal plate frame and a metal membrane are provided, wherein the metal membrane has a contact face and an evaporation face which are opposite; the metal membrane is horizontally arranged above the metal plate frame, the evaporation face is kept downward, and the metal membrane expands to be flat through a tensioning machine; the peripheral edge of the metal membrane expanding to be flat is welded to the metal plate frame through a welding process; and evaporation holes are machined in the metal membrane through an etching process and penetrate the contact face from the evaporation face. By means of the machining method, the size accuracy of the formed evaporation holes can be improved obviously, the reject ratio and the condemnation factor can be reduced, and meanwhile the production cost is greatly reduced.

Description

technical field [0001] The invention relates to the technical field of OLED display and lighting, in particular to a high-precision metal mask processing method. Background technique [0002] Organic electroluminescent devices have many advantages such as self-luminescence, fast response time, wide viewing angle, low cost, simple manufacturing process, good resolution and high brightness, and are considered to be the emerging application technology of the next generation of flat-panel displays. In OLED (Organic Light-Emitting Diode, organic electroluminescent diode) technology, the mask plate technology in vacuum evaporation is a very important and key technology, and the level of this technology directly affects the quality and manufacturing cost of OLED products. [0003] The traditional evaporation mask is to process the required evaporation holes on the metal diaphragm first, and then weld the metal diaphragm to the metal plate frame. However, when the metal diaphragm i...

AI Technical Summary

Problems solved by technology

However, when the metal diaphragm is welded to the plate frame, the metal diaphragm needs to be stretched and tightened, and the evaporation hole has been made on the metal diaphragm, and the evaporation hole will be tightened during the flattening process. Deformation due to force, the evaporation hole deviates from the original design size and shape, resulting in shape and size errors, and because the OLED display manufacturing process requires very high precision of the evaporation hole, this error will obviously affect the evaporation effect. A very large negative impact directly reduces the evaporation effect and causes large defects in the produced OLED display

In addition, in the prior art, in order to reduce the impact on the vapor deposition hole during leveling and tensioning, a high-precision automatic tensioning machine is generally used, and the cost of a tensioning machine is tens of millions, so the cost is extremely high, and still There are problems of dimensional accuracy and high tension failure rate

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