High voltage schottky diode
A Schottky diode and Schottky contact technology, applied in electrical components, circuits, semiconductor devices, etc., can solve the problems of low reverse bias voltage, increase in size, large reverse leakage current, etc., to reduce leakage current, The effect of increasing the concentration and increasing the breakdown voltage
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[0035] All the features disclosed in this specification, or all disclosed methods or steps in the process, except for mutually exclusive features and / or steps, can be combined in any manner.
[0036] Any feature disclosed in this specification (including any additional claims and abstract), unless specifically stated, can be replaced by other equivalent or alternative features with similar purposes. That is, unless otherwise stated, each feature is just one example of a series of equivalent or similar features.
[0037] Such as figure 1 , The high-voltage Schottky diode of the present invention includes a substrate, an epitaxial layer, a metal contact layer, and a protective layer; an epitaxial layer is epitaxially grown on the upper surface of the substrate; a plurality of trenches are formed in the epitaxial layer at intervals; The metal contact layer is provided on the upper surface of the epitaxial layer; both ends of the metal contact layer are provided with an ohmic contact ...
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