TFT and manufacturing method thereof
A technology of thin-film transistors and manufacturing methods, which is applied in semiconductor/solid-state device manufacturing, electric solid-state devices, semiconductor devices, etc., can solve the problems of affecting the aperture ratio of pixel units, affecting the display effect, and reducing the display effect, so as to improve the display effect, Process saving and cost reduction effect
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[0020] see figure 1 with figure 2 , figure 1 It is a schematic flowchart of an embodiment of a manufacturing method of a thin film transistor provided by the present invention; figure 2 yes figure 1 Schematic diagram of the process corresponding to each step. combine figure 1 with figure 2 As shown, the manufacturing method includes the following steps:
[0021] S1: providing a substrate 11 .
[0022] Wherein, the substrate 11 may be a glass substrate or a plastic substrate. Further, while providing the substrate 11 , the substrate 11 is cleaned or sanded to remove impurities on the surface of the substrate 11 , and the substrate 11 is optionally dried through a drying process to provide a clean substrate 11 .
[0023] S2: forming the first buffer layer 12 on the substrate 11 .
[0024] Wherein, the first buffer layer 12 may be formed by deposition or coating, such as using physical vapor deposition (PVD), chemical vapor deposition (CVD) equipment or a coating mach...
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