A magnetic levitation precision positioning platform

Abstract

The invention discloses a maglev type precise positioning platform which comprises a mounting plate, a movement platform, a base, a linear motor drive device and an electromagnet suspension drive device, wherein the mounting plate, the movement platform and the base are sequentially connected in the vertical direction; the electromagnet suspension drive device comprises electromagnets and armatures, the electromagnets are mounted on the mounting plate, and the armatures are arranged on the upper surface, corresponding to the lower portions of the electromagnets, of the movement platform; the linear motor derive device comprises a permanent magnet array and a hollow coil winding, the permanent magnet array is embedded to the lower surface of the movement platform, and the hollow coil winding is arranged at the position, corresponding to the lower portion of the permanent magnet array, of the base. The maglev type precise positioning platform has the advantages of being high in accuracy, large in stroke and high in movement stroke and response speed in the vertical direction, the mechanical structure is simplified, and generation of multi-freedom-degree movement is facilitated.

Description

Technical field [0001] The invention relates to the field of precision processing and manufacturing, in particular to a magnetic suspension type precision positioning platform. Background technique [0002] Modern science and technology are increasingly studying the microscopic field and have entered the era of high-precision nanometer and atomic scale. Micro-positioning technology is one of the core key technologies in the micro-field research. Its technological development level directly affects the development level of micro-field technology. Therefore, as a multi-degree-of-freedom high-precision positioning platform for the engineering application of micro-positioning technology, it is extremely important. Realistic research significance. In particular, in the field of lithography machines, the line width of the process node for lithography reaches 22nm, and the diameter of the wafer is further increased, which means that the requirements for positioning platforms are increa...

AI Technical Summary

Problems solved by technology

The positioning platform driven by a servo motor and driven by a ball screw is a widely used planar motion positioning method at present, but its disadvantages are: due to the intermediate transition between the motion platform and the driving mechanism, including couplings, screw rods, bearings, etc. The link increases the inertial mass of the positioning mechanism, which has a great influence on the response frequency of the system, and the positioning accuracy of the system is reduced due to factors such as friction and elastic deformation in the intermediate transition link, and because the shape of the screw rod is thin Long ones will be deformed under the action of external force field and temperature field, which will further affect the positioning accuracy

The disadvantages of using linear motors for direct drive are: due to the lack of buffer links in the middle of the system and the corresponding end effects, the control difficulty of the system increases, and the use of linear motors as the driving mechanism has serious heat generation, insufficient system thrust, and movement. Lightweight parts and other issues

However, the inertia of the air suspension platform is large and the stiffness of the suspension support is low, so that the platform's bearing capacity and impact resistance are low, which reduces the sensitivity and positioning accuracy of the entire platform, and the air suspension positioning platform cannot be used in a vacuum environment.

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