Central sensor restoration method and central sensor

Abstract

The invention discloses a central sensor restoration method and a central sensor. The method comprises the steps: removing a whole light receiving surface, which comprises a small hole and a mirror plane, and a built-in optical path in an original central sensor; taking out a receiving pipe, placing the receiving pipe at the position of the small hoe, and enabling the receiving surface of the receiving pipe to face downwards; selecting the position of a light receiving surface through measuring an output voltage of the central sensor; and enabling the receiving pipe to be fixed. The method shortens a laser path and reduces the laser energy consumption because of the removal of the internal optical path, thereby reducing the requirements for laser power and prolonging the service life of a laser diode. Meanwhile, because the position of the light receiving surface can be adjusted, the method can select the optimal absorption position of a silicon photocell, and greatly reduce the restoration difficulty.

Description

technical field [0001] The invention relates to the technical field of semiconductor equipment, in particular to a method for repairing a center sensor and a center sensor that is easy to repair. Background technique [0002] The center sensor is an important part of the ESEC (European Semiconductor Equipment Center, European Semiconductor Equipment Center) chip loading machine, which is mainly used for anti-reverse and preliminary positioning of the lead frame. Center sensors are expensive and have an extremely low repair rate. The damage of the center sensor is mostly due to the aging of the optical path. [0003] Such as Figure 5 As shown, the original photoelectric detection area of ​​the central sensor is a small hole 100 with a diameter of 1 mm, surrounded by a layer of mirror 200 . Its detection principle is as Figure 6 As shown, the laser diode 300 emits laser light, which enters the small hole 100 after being focused by the lens, and then enters the silicon pho...

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Problems solved by technology

[0005] 1. Laser diode monopoly, the original light source (ie laser diode) is model IM220, with PD (feedback protection terminal), common anode laser diode, this type of laser diode cannot be found in the market;

[0006] 2. The light receiving surface is too small and the position is limited. The effective area of ​​the light emitted by the laser diode to the receiving surface through the lens is 1mm (determined by measuring the spot), and the center sensor is mainly positioned by detecting the edge of the small hole of the lead frame. Therefore, manufacturing a 1mm restricted area on the light receiving surface increases the difficulty of maintenance—laser diodes have different emission angles, and the performance and functions of the original device are considered too rigorously, which brings great harm to maintenance, debugging, and component replacement. difficulty;

[0007] 3. The built-in optical path is difficult to maintain. The key components of the optical path of the central sensor are laser diodes and photocells. The principle is nothing more than letting light enter the silicon photocell. The two 45° mirrors of the original optical path are completely sealed and cannot be debugged and repaired.

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