Area-array giant-magnetoresistance magnetic sensor and manufacturing method thereof

A technology of a magnetic sensor and a manufacturing method, applied in the field of sensing and detection, can solve the problems of low integration, limited use environment and application scope of the sensor, etc., and achieve the effects of high accuracy, space-saving arrangement, and easy processing and production.

Inactive Publication Date: 2016-06-22
XI AN JIAOTONG UNIV
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  • Application Information

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Problems solved by technology

However, this array sensor has obvious shortcomings
The number of array elements of the sensor is only 8, and each array element is composed of a giant magnetoresistive chip and two strip-shaped alnic

Method used

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  • Area-array giant-magnetoresistance magnetic sensor and manufacturing method thereof
  • Area-array giant-magnetoresistance magnetic sensor and manufacturing method thereof
  • Area-array giant-magnetoresistance magnetic sensor and manufacturing method thereof

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Embodiment Construction

[0032] The invention provides an area array giant magnetoresistive magnetic sensor, which uses a giant magnetoresistance array to detect the magnetic field on the entire surface, and outputs quickly in a row scanning manner.

[0033] see figure 1 and figure 2 As shown, the invention discloses an area array giant magnetoresistive magnetic sensor, which includes a giant magnetoresistance array, a power supply module, an address selector, an analog front-end module and an analog-to-digital converter. The giant magnetoresistive array consists of 256 spin valve giant magnetoresistive units in the form of a 16*16 area array, and each unit is designed as a meandering resistance; the power supply module provides input voltage signals for the entire system; the address selector is mainly composed of Composed of row decoders, the function is to output the signals of 16 giant magnetoresistive array elements row by row in row scanning mode; the analog front-end performs signal amplifica...

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Abstract

The invention discloses an area-array giant-magnetoresistance magnetic sensor and a manufacturing method thereof. A data acquisition processing unit and a giant magnetoresistance array are included. The data acquisition processing unit comprises a power supply module, an address selector, a simulated front end and an analog-digital converter. The power supply module is connected to the giant magnetoresistance array through the address selector. The giant magnetoresistance array is connected to the analog-digital converter through a simulated front end module. The giant magnetoresistance array comprises 256 meandering-type-resistance-form giant-magnetoresistance magnetic sensors adopting a nanometer multilayer film structure and the sensors form a 16*16 area-array-form giant-magnetoresistance array. Based on a standard CMOS integrated circuit technology, an external data acquisition processing unit circuit is individually processed; after the external circuit processing is completed, the giant-magnetoresistance array is processed through two-step lithography. In the invention, the area-array giant-magnetoresistance magnetic sensors can realize accurate plane magnetic field high speed synchronization detection; miniaturization and integration degrees are high; a product technology is compatible and batch production is convenient.

Description

【Technical field】 [0001] The invention belongs to the field of sensing and detection, and in particular relates to an area array giant magnetoresistive magnetic sensor and a manufacturing method thereof. 【Background technique】 [0002] The magnetic field can be used as a carrier of various information, and it exists widely in all aspects of modern industrial society. Magnetic detection technology has become an important detection means. Magnetic sensors are widely used in modern industry and electrical and electronic products to obtain physical parameters such as current, position, and direction by measuring the intensity of the induced magnetic field. [0003] In the prior art, there are many different types of sensors that can be used to measure the magnetic field, such as Hall (Hall) elements, anisotropic magnetoresistance (AMR) elements, giant magnetoresistance (GMR) elements or tunnel junction giants. Magnetoresistive (TMR) elements are magnetic sensors that are sensi...

Claims

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Application Information

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IPC IPC(8): G01R33/09H01L43/08H01L43/12
CPCG01R33/093H10N50/10H10N50/01
Inventor 张国钢刘竞存陈前耿英三王建华
Owner XI AN JIAOTONG UNIV
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