Acquisition method of silicon micromachined gyroscope system parameters for precision design
A gyroscope system and silicon micro-machine technology, which is applied to steering induction equipment, measuring devices, instruments, etc., can solve the problems of difficult realization and complicated design process of silicon micro-machine gyroscope, and achieve the effect of overcoming complex parameters.
Active Publication Date: 2018-08-21
NORTHWESTERN POLYTECHNICAL UNIV
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Problems solved by technology
However, the mechanical vibration coupling between the silicon micromachined gyroscope driving mode and the sensitive mode, the electrical detection signal is extremely weak and coupled with each other, and there are multiple complex closed-loop control circuits with various parameters, such as: accuracy, system noise, System sensitivity, interface circuit noise, mechanical noise, circuit gain, capacitance resolution, effective quality factor, mechanical sensitivity, parasitic capacitance, feedback capacitance, equivalent voltage noise, equivalent current noise, mechanical bandwidth, center capacitance, drive displacement, resonance Frequency, quality factor, etc. make the design process of precision-oriented silicon micromachined gyroscopes particularly complicated and difficult to implement
At present, there is no related research on precision-oriented silicon micromachined gyro system parameter design methods in published literature reports
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[0023] In this embodiment, a method for obtaining parameters of a gyroscope system oriented to precision design is given, and the design process in this embodiment is as follows:
[0024] The first step is to design a silicon micromachined gyroscope with an accuracy of 0.015° / s according to the actual application requirements, where the application bandwidth BW requirement is 19Hz, and the driving frequency is f d is 3531Hz, then according to the formula (1), the effective quality factor Q is calculated eff is 93; and then deduce the quality factor Q according to the formula (2) s is 8100 and is the minimum quality factor required by the system design; at this time, the value of the driving displacement X is 6×10 -6 m, according to the expression (4), the overlapping length of comb teeth l s0 Designed as 1×10 -5 m, Boltzmann constant K B 1.38×10 -23 J / K, Kelvin T set to room temperature 298K, gyro vibration mass m s Set to 4.5×10 -7 kg, satisfying the value range of the...
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The invention discloses a parameter acquisition method of a precision design-oriented silicon micromechanical gyroscope system and belongs to the field of design of a micromechanical system. According to the method, a set of complete design flow which starts from a gyroscope precision index by considering parameters including precision, circuit noises, bandwidth, sensitivity, resonant frequency, quality factors, mechanical noises, parasitic capacitance, feedback capacitance, capacitance resolution ratio, driving displacement, excitation voltage and the like, and is ended by central capacitance is given, and a guide method is provided for the precision design of a silicon micromechanical gyroscope. By establishing the relation between the parameters, troubles of a designer, caused by the characteristics of complexity and variety of the parameters of the silicon micromechanical gyroscope, are overcome, and the parameter design of the precision design-oriented silicon micromechanical gyroscope system is finished.
Description
technical field [0001] The invention relates to a design method of a silicon micro-mechanical gyroscope, in particular to a method for acquiring system parameters of a silicon micro-mechanical gyroscope for precision design, and belongs to the field of micro-electromechanical system design. Background technique [0002] Gyroscope is an inertial device used to measure the angular rate of rotation of an object. It has important applications in navigation guidance, deep space exploration, platform stability control, automotive industry, consumer electronics and other fields. [0003] Accuracy is the most important index to evaluate the performance of silicon micro-machined gyroscopes. Therefore, the design method of silicon micro-machined gyroscopes oriented to precision is of great significance. However, the mechanical vibration coupling between the silicon micromachined gyroscope driving mode and the sensitive mode, the electrical detection signal is extremely weak and couple...
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IPC IPC(8): G01C25/00G01C19/56
CPCG01C19/56G01C25/005
Inventor 苑伟政申强谢建兵常洪龙
Owner NORTHWESTERN POLYTECHNICAL UNIV