High-beam direct-current hollow cathode plasma source

Abstract

The invention discloses a high-beam direct-current hollow cathode plasma source which comprises a sealing pipe, a hollow electrode, a cathode plate, a connecting plate, a first anode plate, a second anode plate, an arc strike spacer bush and a control power supply. The hollow electrode is installed on the cathode plate, the sealing pipe is connected with the cathode plate and sleeves the hollow electrode, the top of the sealing pipe is provided with a gas leading-in port for inputting gas into the hollow electrode, and the connecting plate is used for performing sealed connection of the cathode plate and the first anode plate and forms an electric potential difference between the cathode plate and the first anode plate. A high density plasma beam is formed between the second anode plate and the hollow electrode. The arc strike spacer bush is arranged between the hollow electrode and the second anode plate. The control power supply is provided with an anode, a cathode and an arc strike electrode. The anode is connected with the second anode plate, the cathode is connected with the cathode plate, and the arc strike electrode is connected with the first anode plate. The high-beam direct-current hollow cathode plasma source can meet the use requirements on various gases, the plasma beam high in ionization rate can be generated, and thus the energy conversion efficiency is effectively improved.

Description

technical field [0001] The invention relates to the technical field of low-temperature plasma, in particular to a high-beam direct current hollow cathode plasma source. Background technique [0002] Due to the sharp increase in global energy demand, magnetic confinement fusion energy is considered to be one of the most promising sustainable and clean energy sources among many new energy sources. During the stable operation of the magnetic confinement device, the interaction between the plasma and the first wall and divertor materials has become a scientific and engineering problem that needs to be solved for the commercialization of fusion reactors. Due to the high complexity of the operating environment of the magnetic confinement device, it is extremely difficult to carry out online fine research. At present, laboratory linear plasma devices are generally used to simulate the operating conditions of fusion device stacks. Therefore, it is possible to provide high-intensity ...

AI Technical Summary

Problems solved by technology

[0003] At present, the microwave and radio frequency discharge plasma sources used in linear plasma devices have low plasma flux density due to their low energy coupling efficiency, and it is difficult to simulate the high flux density requirements in research such as fusion reactors.

The three-cathode cascaded arc plasma source can generate a high-flux plasma beam through arc discharge, but its structure is complex and the gas consumption is large. It needs to be equipped with a differential cavity and a large pumping speed pump group to remove neutral gas, and the cost is high. and difficult to use with expensive gases

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