Apparatus of generating atmospheric-pressure uniform plasma brush and method thereof
A plasma brush and atmospheric pressure technology, applied in the field of plasma, can solve the problems of poor atmospheric pressure plasma brush uniformity and plasma brush uniformity, and achieve the effects of low power consumption, large size, and wide application range
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Embodiment 1
[0041] The present invention produces the structure of the device of uniform plasma brush under atmospheric pressure as figure 1 , figure 2 As shown, it mainly includes the discharge part and the gas supply part.
[0042] The discharge section is composed of a dielectric plate member, a pair of discharge electrodes, a pair of reinforcing electrodes and an AC power source 7 .
[0043] The medium plate component is composed of two medium plates 1 arranged in parallel and sealed between the left and right edges, and the gap between the two medium plates 1 forms an air channel 3 . Dielectric plate 1 is made of quartz material, its left and right width is 25mm, and its front and rear height is 70mm.
[0044] The discharge electrode pair is composed of a first needle electrode 11 and a second needle electrode 12 that are arranged oppositely between two dielectric plates 1 and near the front end port of the dielectric plate member, wherein the discharge tip of the first needle ele...
Embodiment 2
[0050] Adopt the method in the device in embodiment 1 to produce the uniform plasma brush of atmospheric pressure, concrete operating steps are as follows:
[0051] (1) Start the gas supply part, output argon gas to the air channel, and adjust the gas flow meter until the volume flow rate of argon gas is 8L / min (that is, the volume flow rate per unit area of the air channel cross section is 0.16L / min·mm 2 );
[0052] (2) When the voltage of the AC power supply (output frequency is 60kHz) is increased to 4kV, the enhanced electrode pair produces a glow dielectric barrier discharge in the airway, and then when the AC power supply voltage is continuously increased to 8kV, a dielectric barrier discharge occurs between the discharge electrode pair. Then adjust the voltage and frequency of the AC power supply on the basis of 8kV and 60kHz. When the voltage is adjusted to 11kV and the output frequency is 60kHz, a uniform atmospheric pressure plasma brush 10 is formed outside the po...
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