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Preparation process of a carbon/nickel oxide/nickel patterned microelectrode

A preparation process and nickel oxide technology, which is applied in the manufacture of hybrid/electric double layer capacitors, hybrid capacitor electrodes, etc., can solve the problems of incompatibility of micromachining processes and inability to realize carbon/nickel oxide composite microdevices and microsystems, etc. Achieve the effect of clear and complete fine structure, improved electrochemical capacity, and complete pattern

Inactive Publication Date: 2018-01-23
WUHAN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the existing mainstream pyrolytic carbon-nickel oxide composite materials preparation methods are not compatible with the micromachining process, and it is impossible to realize carbon / nickel oxide composite micro-devices and microsystems.

Method used

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  • Preparation process of a carbon/nickel oxide/nickel patterned microelectrode
  • Preparation process of a carbon/nickel oxide/nickel patterned microelectrode
  • Preparation process of a carbon/nickel oxide/nickel patterned microelectrode

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0040] A carbon / nickel oxide / nickel patterned microelectrode manufacturing process, comprising the following steps:

[0041] 1. Synthesis of hollow nickel oxide nanospheres:

[0042] 1) Dissolve 0.8 g of glucose in 80 mL of deionized water in a beaker, and stir to obtain a transparent solution; dropwise add 1M sodium hydroxide solution therein, adjust the pH to 8, and obtain a mixed solution I;

[0043] 2) Heat the mixed liquid I in a water bath to 80°C for 3 hours, and transfer it to the inner lining of a polytetrafluoroethylene high-temperature and high-pressure reactor with a capacity of 100mL, assemble the inner lining of the high-temperature and high-pressure reactor with the outer stainless steel lining, and then place Heat and keep it in an oven at 180°C for 5h, then wash the obtained reaction product I (multiple washes with a mixed solution of deionized water and absolute ethanol), centrifuge and dry (dry at 60°C for 12h), to obtain a solid product I;

[0044] 3) Weig...

Embodiment 2

[0057] A carbon / nickel oxide / nickel patterned microelectrode manufacturing process, comprising the following steps:

[0058] 1. Synthesis of hollow nickel oxide nanospheres:

[0059] 1) Dissolve 0.8 g of glucose in 80 mL of deionized water in a beaker, and stir to obtain a transparent solution; dropwise add 1M sodium hydroxide solution therein, adjust the pH to 7.5, and obtain a mixed solution I;

[0060] 2) Heat the mixed liquid I in a water bath to 70°C for 3 hours, and transfer it to the inner lining of a polytetrafluoroethylene high-temperature and high-pressure reactor with a capacity of 100mL, assemble the inner lining of the high-temperature and high-pressure reactor with the stainless steel outer lining, and then place Heat and keep it in an oven at 160°C for 5 hours, then wash the obtained reaction product I (multiple washes with a mixed solution of deionized water and absolute ethanol), centrifuge and dry (dry at 60°C for 12 hours), to obtain a solid product I;

[0...

Embodiment 3

[0074] A carbon / nickel oxide / nickel patterned microelectrode manufacturing process, comprising the following steps:

[0075] 1. Synthesis of hollow nickel oxide nanospheres:

[0076] 1) Dissolve 0.8 g of glucose in 80 mL of deionized water in a beaker, and stir to obtain a transparent solution; dropwise add 1M sodium hydroxide solution therein, adjust the pH to 8.5, and obtain a mixed solution I;

[0077] 2) Heat the mixed liquid I in a water bath to 80°C for 4 hours, and transfer it to the inner lining of a polytetrafluoroethylene high-temperature and high-pressure reactor with a capacity of 100mL, and assemble the inner lining of the high-temperature and high-pressure reactor with the stainless steel outer lining, and then place Heating and heat preservation in an oven at 170°C for 6h, and then washing the obtained reaction product I (multiple washings with a mixed solution of deionized water and absolute ethanol), centrifuging and drying (drying at 60°C for 12h), to obtain ...

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Abstract

The invention discloses a carbon / nickel oxide / nickel patterned microelectrode preparation process, comprising the following steps: 1) synthesis of hollow nickel oxide nanospheres; 2) patterning of photoresist-nickel oxide nanosphere composite microelectrodes : The hollow nickel oxide nanospheres and the photoresist are subjected to mechanical stirring and ultrasonic treatment, and the obtained mixture is coated on the electrode substrate, and then photolithography, development, and rinsing are carried out; 3) microelectrodes are pyrolyzed at high temperature. The invention innovatively utilizes the photoresist property of the photoresist, and uses the photosensitive resin in the photoresist as the carbon source to compound the hollow nickel oxide nanospheres synthesized by the hydrothermal method to obtain carbon / nickel oxide / nickel The patterned microelectrode realizes the purpose of microelectric polarization of the pyrolytic carbon-nickel oxide composite material, and the obtained microelectrode exhibits good electrochemical and mechanical properties, and has broad application prospects.

Description

technical field [0001] The invention belongs to the intersection field of nanometer material and micromachining technology, and specifically relates to a preparation technology based on a novel carbon / nickel oxide / nickel patterned microelectrode. Background technique [0002] Micro-Electro-Mechanical System (MEMS, Micro-Electro-Mechanical System) developed on the basis of micro-nano technology is widely used in various fields of society. It has been widely studied and applied to various micro devices and their systems because of its characteristics of control and repeatability. Nickel oxide is widely used in electrochemical supercapacitors as a substitute for ruthenium dioxide because of its large theoretical capacity, low price, and environmental friendliness. At present, the existing mainstream pyrolytic carbon-nickel oxide composite preparation methods are not compatible with micromachining processes, and cannot realize carbon / nickel oxide composite microdevices and micr...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01G11/86H01G11/46
CPCY02E60/13
Inventor 何亮杨艳娟麦立强
Owner WUHAN UNIV OF TECH